Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079578857> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2079578857 abstract "The Extreme Ultra Violet lithography (EUVL) is expected to be the most promising semiconductor fabrication technology for 22 nm node and beyond. Kozawa and his colleagues have documented that non-constant acid diffusion coefficient have a significant impact on the latent image quality of 22 nm patterns. We prepared a novel main chain decomposable star shaped polymer (STAR polymer) to examine the concept. STAR polymer consists of a core unit and several arm units which connect to the core unit as shown in Fig.1. The arm units are partially protected poly (<i>p</i>-hydroxystyrene) (PHS) base linear polymer. The core unit that attached on the arm units employs easily acid cleavable group. The adoption of living anion polymerization for the arm units of the STAR polymer makes the controlled polymerization of one monomer unit possible. Based on this material design concept, the protecting group on the arm unit is de-protected by the acid generated during exposure and continues its reaction at the Post Exposure Bake (PEB) step and the acid will also cleave the bonding of the core unit which would then result in a lower molecular weight polymer of lower <i>T</i><i><sub>g</sub></i>. The concept of the novel polymer, which is the decomposition of the core and protecting group of arm units of the STAR polymer, was confirmed with a gel-permeation-chromatography (GPC) study. The thermal property of the exposed and unexposed area was also investigated through a thermal flow method. The <i>T</i><i><sub>g</sub></i> decrease of the exposed area was observed with the STAR polymer, regardless of increase in <i>T</i><i><sub>g</sub></i> of the linear polymer. General lithographic performance on EUV exposure for STAR polymer was also discussed." @default.
- W2079578857 created "2016-06-24" @default.
- W2079578857 creator A5010349870 @default.
- W2079578857 creator A5029399333 @default.
- W2079578857 creator A5050280214 @default.
- W2079578857 creator A5079090321 @default.
- W2079578857 date "2009-03-13" @default.
- W2079578857 modified "2023-09-26" @default.
- W2079578857 title "Main chain decomposable star shaped polymer for EUV resist" @default.
- W2079578857 doi "https://doi.org/10.1117/12.813990" @default.
- W2079578857 hasPublicationYear "2009" @default.
- W2079578857 type Work @default.
- W2079578857 sameAs 2079578857 @default.
- W2079578857 citedByCount "6" @default.
- W2079578857 countsByYear W20795788572012 @default.
- W2079578857 countsByYear W20795788572014 @default.
- W2079578857 countsByYear W20795788572018 @default.
- W2079578857 crossrefType "proceedings-article" @default.
- W2079578857 hasAuthorship W2079578857A5010349870 @default.
- W2079578857 hasAuthorship W2079578857A5029399333 @default.
- W2079578857 hasAuthorship W2079578857A5050280214 @default.
- W2079578857 hasAuthorship W2079578857A5079090321 @default.
- W2079578857 hasConcept C127413603 @default.
- W2079578857 hasConcept C159985019 @default.
- W2079578857 hasConcept C162996421 @default.
- W2079578857 hasConcept C166940927 @default.
- W2079578857 hasConcept C171250308 @default.
- W2079578857 hasConcept C178790620 @default.
- W2079578857 hasConcept C181199279 @default.
- W2079578857 hasConcept C185592680 @default.
- W2079578857 hasConcept C188027245 @default.
- W2079578857 hasConcept C19014433 @default.
- W2079578857 hasConcept C192562407 @default.
- W2079578857 hasConcept C42360764 @default.
- W2079578857 hasConcept C44228677 @default.
- W2079578857 hasConcept C521977710 @default.
- W2079578857 hasConceptScore W2079578857C127413603 @default.
- W2079578857 hasConceptScore W2079578857C159985019 @default.
- W2079578857 hasConceptScore W2079578857C162996421 @default.
- W2079578857 hasConceptScore W2079578857C166940927 @default.
- W2079578857 hasConceptScore W2079578857C171250308 @default.
- W2079578857 hasConceptScore W2079578857C178790620 @default.
- W2079578857 hasConceptScore W2079578857C181199279 @default.
- W2079578857 hasConceptScore W2079578857C185592680 @default.
- W2079578857 hasConceptScore W2079578857C188027245 @default.
- W2079578857 hasConceptScore W2079578857C19014433 @default.
- W2079578857 hasConceptScore W2079578857C192562407 @default.
- W2079578857 hasConceptScore W2079578857C42360764 @default.
- W2079578857 hasConceptScore W2079578857C44228677 @default.
- W2079578857 hasConceptScore W2079578857C521977710 @default.
- W2079578857 hasLocation W20795788571 @default.
- W2079578857 hasOpenAccess W2079578857 @default.
- W2079578857 hasPrimaryLocation W20795788571 @default.
- W2079578857 hasRelatedWork W1592072547 @default.
- W2079578857 hasRelatedWork W1967133635 @default.
- W2079578857 hasRelatedWork W2004221531 @default.
- W2079578857 hasRelatedWork W2064192730 @default.
- W2079578857 hasRelatedWork W2088249332 @default.
- W2079578857 hasRelatedWork W2323078905 @default.
- W2079578857 hasRelatedWork W2346601165 @default.
- W2079578857 hasRelatedWork W2488009843 @default.
- W2079578857 hasRelatedWork W2547437702 @default.
- W2079578857 hasRelatedWork W3159946496 @default.
- W2079578857 isParatext "false" @default.
- W2079578857 isRetracted "false" @default.
- W2079578857 magId "2079578857" @default.
- W2079578857 workType "article" @default.