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- W2079581237 abstract "Abstract A review of critical reliability issues in submicron MOSFETs with oxynitride gate dielectrics is presented. We have focussed our attention on: substrate and gate currents in short channel MOSFETs, hot carrier induced MOSFET degradation under DC and AC stress, gate-induced drain leakage current and its enhancement due to stress, neutral trap generation due to electrical stress and degradation of analog MOSFET parameters. We have also discussed the problems of radiation induced neutral trap generation and boron penetration through the gate dielectric, which arise due to the advanced processing techniques utilized in submicron MOSFET processing. It is concluded that the use of oxynitride gate dielectrics can effectively solve several reliability issues encountered in scaling down MOSFETs to submicron dimensions." @default.
- W2079581237 created "2016-06-24" @default.
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- W2079581237 date "1993-09-01" @default.
- W2079581237 modified "2023-09-27" @default.
- W2079581237 title "Reliability issues in submicron MOSFETs with oxynitride gate dielectrics" @default.
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- W2079581237 doi "https://doi.org/10.1016/0026-2714(93)90090-l" @default.
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