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- W2079594558 abstract "We have proposed a new nondestructive evaluation method for detecting delamination between a chip and metallic bumps by measuring local surface deformation of the chip. The magnitude of the local surface deformation was analyzed using a three-dimensional finite element analysis. The local deformation of a silicon chip between adjoining two bumps is a strong function of the magnitude of the mismatch of the thermal expansion coefficient between bump material and underfill material. The amplitude of the local deformation due to the delamination of metallic bumps exceeds 200 nm easily, and it sometimes reaches 600 nm when the underfill material was assumed to be epoxy resin. To confirm that such estimated local deformation of a chip thinner than 100 μm appears in actual stacked structures, we applied a confocal scanning blue laser microscope to measure the local deformation. The measured local deformation was about 200 nm when the thickness of a chip was 100 μm, as was predicted by a finite element analysis. Therefore, it is concluded that a nondestructive inspection method for detecting open failures of bump interconnections in three-dimensional stacked structure has been established." @default.
- W2079594558 created "2016-06-24" @default.
- W2079594558 creator A5009219051 @default.
- W2079594558 creator A5020852495 @default.
- W2079594558 date "2007-01-01" @default.
- W2079594558 modified "2023-09-23" @default.
- W2079594558 title "Development of a Nondestructive Inspection Method for Detecting Open Failures of Micro Bump Interconnections in Three Dimensionally Stacked LSI Chips" @default.
- W2079594558 doi "https://doi.org/10.1115/ipack2007-33257" @default.
- W2079594558 hasPublicationYear "2007" @default.
- W2079594558 type Work @default.
- W2079594558 sameAs 2079594558 @default.
- W2079594558 citedByCount "5" @default.
- W2079594558 countsByYear W20795945582012 @default.
- W2079594558 crossrefType "proceedings-article" @default.
- W2079594558 hasAuthorship W2079594558A5009219051 @default.
- W2079594558 hasAuthorship W2079594558A5020852495 @default.
- W2079594558 hasConcept C119599485 @default.
- W2079594558 hasConcept C120665830 @default.
- W2079594558 hasConcept C121332964 @default.
- W2079594558 hasConcept C126838900 @default.
- W2079594558 hasConcept C127413603 @default.
- W2079594558 hasConcept C135628077 @default.
- W2079594558 hasConcept C151730666 @default.
- W2079594558 hasConcept C159985019 @default.
- W2079594558 hasConcept C165005293 @default.
- W2079594558 hasConcept C192562407 @default.
- W2079594558 hasConcept C204366326 @default.
- W2079594558 hasConcept C2779227376 @default.
- W2079594558 hasConcept C30239060 @default.
- W2079594558 hasConcept C56529433 @default.
- W2079594558 hasConcept C58097730 @default.
- W2079594558 hasConcept C66938386 @default.
- W2079594558 hasConcept C68928338 @default.
- W2079594558 hasConcept C71924100 @default.
- W2079594558 hasConcept C77928131 @default.
- W2079594558 hasConcept C79072407 @default.
- W2079594558 hasConcept C86803240 @default.
- W2079594558 hasConceptScore W2079594558C119599485 @default.
- W2079594558 hasConceptScore W2079594558C120665830 @default.
- W2079594558 hasConceptScore W2079594558C121332964 @default.
- W2079594558 hasConceptScore W2079594558C126838900 @default.
- W2079594558 hasConceptScore W2079594558C127413603 @default.
- W2079594558 hasConceptScore W2079594558C135628077 @default.
- W2079594558 hasConceptScore W2079594558C151730666 @default.
- W2079594558 hasConceptScore W2079594558C159985019 @default.
- W2079594558 hasConceptScore W2079594558C165005293 @default.
- W2079594558 hasConceptScore W2079594558C192562407 @default.
- W2079594558 hasConceptScore W2079594558C204366326 @default.
- W2079594558 hasConceptScore W2079594558C2779227376 @default.
- W2079594558 hasConceptScore W2079594558C30239060 @default.
- W2079594558 hasConceptScore W2079594558C56529433 @default.
- W2079594558 hasConceptScore W2079594558C58097730 @default.
- W2079594558 hasConceptScore W2079594558C66938386 @default.
- W2079594558 hasConceptScore W2079594558C68928338 @default.
- W2079594558 hasConceptScore W2079594558C71924100 @default.
- W2079594558 hasConceptScore W2079594558C77928131 @default.
- W2079594558 hasConceptScore W2079594558C79072407 @default.
- W2079594558 hasConceptScore W2079594558C86803240 @default.
- W2079594558 hasLocation W20795945581 @default.
- W2079594558 hasOpenAccess W2079594558 @default.
- W2079594558 hasPrimaryLocation W20795945581 @default.
- W2079594558 hasRelatedWork W2009784035 @default.
- W2079594558 hasRelatedWork W2066729781 @default.
- W2079594558 hasRelatedWork W2079594558 @default.
- W2079594558 hasRelatedWork W2124104377 @default.
- W2079594558 hasRelatedWork W2146718008 @default.
- W2079594558 hasRelatedWork W2156762152 @default.
- W2079594558 hasRelatedWork W2532396595 @default.
- W2079594558 hasRelatedWork W2540013064 @default.
- W2079594558 hasRelatedWork W2542102608 @default.
- W2079594558 hasRelatedWork W2018344158 @default.
- W2079594558 isParatext "false" @default.
- W2079594558 isRetracted "false" @default.
- W2079594558 magId "2079594558" @default.
- W2079594558 workType "article" @default.