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- W2079604074 abstract "By analyzing the spectral domain's phase information, one can use spectrally resolved white-light interferometry (SRWLI) to obtain the profile with a single frame of an interferogram. We present here a two-dimensional (2D) SRWLI method that can be applied to measure narrow rectangle areas. A frequency comb is produced by using a Fabry-Perot (F-P) etalon to filter the broadband source. With the filtered frequency comb illumination, the interference patterns under adjacent wavelengths would be separated by a little distance, which enables us to obtain a 2D profile with a small width. The experimental details of measurement on a step sample are discussed in this paper." @default.
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- W2079604074 date "2012-07-11" @default.
- W2079604074 modified "2023-09-26" @default.
- W2079604074 title "Single-shot two-dimensional surface measurement based on spectrally resolved white-light interferometry" @default.
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- W2079604074 doi "https://doi.org/10.1364/ao.51.004971" @default.
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