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• W2079622029 endingPage "4463" @default.
• W2079622029 startingPage "4460" @default.
• W2079622029 abstract "The transient supersaturation in a system undergoing Ostwald ripening is related to the cluster formation energy ${E}_{mathrm{fc}}$ as a function of cluster size $n$. We use this relation to study the energetics of self-interstitial clusters in Si. Measurements of transient enhanced diffusion of B in Si-implanted Si are used to determine $S(t)$, and inverse modeling is used to derive ${E}_{mathrm{fc}}(n)$. For clusters with $n>15$, ${E}_{mathrm{fc}}ensuremath{approx}0.8mathrm{eV}$, close to the fault energy of ${113}$ defects. For clusters with $n<10$, ${E}_{mathrm{fc}}$ is typically 0.5 eV higher, but stabler clusters exist at $nensuremath{approx}4$ ( ${E}_{mathrm{fc}}ensuremath{approx}1.0mathrm{eV}$) and $nensuremath{approx}8$ ( ${E}_{mathrm{fc}}ensuremath{approx}0.6mathrm{eV}$)." @default.
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• W2079622029 date "1999-05-31" @default.
• W2079622029 modified "2023-09-27" @default.
• W2079622029 title "Energetics of Self-Interstitial Clusters in Si" @default.
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• W2079622029 doi "https://doi.org/10.1103/physrevlett.82.4460" @default.
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