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- W2079658561 abstract "Sputtering is one of the essential sources of the impurity release from the plasma boundaries in the fusion devices. Sputtering is also a coating process which involves the transport of almost any material from a source to a substrate of almost any other material. Calculations of the impurity fluxes in the first process and the optimization of the experimental conditions needed in the second process require the detailed data about the sputtered atoms. These data are only available for very few ion target combinations. A systematic study to the parameters that effect the process of sputtering is carried out using a modified Monte Carlo program. Among these parameters are the type of the incident ion, its initial energy, its direction and the type of the target." @default.
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- W2079658561 date "1989-01-01" @default.
- W2079658561 modified "2023-09-26" @default.
- W2079658561 title "A Parametric Study of Sputtering using a Modified Monte Carlo Calculation" @default.
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- W2079658561 doi "https://doi.org/10.1080/10256018908624057" @default.
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