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- W2079662511 abstract "A commercial scanning electron microscope, modified for high-current operation, has been successfully used to anneal silicon layers driven amorphous by high doses of implanted arsenic. Selected-area electron channeling patterns indicate complete recrystallization of the implanted layer with substrate orientation. Spreading-resistance measurements reveal complete electrical activation of the implanted arsenic with no dopant redistribution. The potential for localized annealing through a focused scanning electron beam is illustrated by the fabrication of submicron islands of recrystallized silicon surrounded by amorphous silicon of very high resistivity." @default.
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- W2079662511 date "1979-09-15" @default.
- W2079662511 modified "2023-09-27" @default.
- W2079662511 title "High-resolution scanning electron-beam annealing of ion-implanted silicon" @default.
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- W2079662511 doi "https://doi.org/10.1063/1.91170" @default.
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