Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079683556> ?p ?o ?g. }
- W2079683556 endingPage "424" @default.
- W2079683556 startingPage "419" @default.
- W2079683556 abstract "Ti and Si dual-doped hydrogenated amorphous carbon (a-C:H) films were synthesized by mid-frequency (MF) magnetron sputtering with stationary and rotary substrates. The effects of substrate rotation on the microstructure, surface morphology, internal stress and mechanical properties were investigated. The results show that substrate rotation plays an important role in the growth of the a-C:H films. The film deposited on rotary substrate has a higher sp2 content with high degree of bond disorder and relatively low H content, thus resulting in much lower compressive stress and high hardness. The structural changes induced by the substrate rotation are discussed in terms of subplantation and migration roles of incident species in growth of the films. Moreover, the film deposited on rotary substrate shows smoother surface with small and dense particles, which is attributed to suppressing the shadowing effect by rotating substrate." @default.
- W2079683556 created "2016-06-24" @default.
- W2079683556 creator A5001885140 @default.
- W2079683556 creator A5008409694 @default.
- W2079683556 creator A5018728399 @default.
- W2079683556 creator A5019397668 @default.
- W2079683556 creator A5071079144 @default.
- W2079683556 creator A5090875147 @default.
- W2079683556 date "2014-02-01" @default.
- W2079683556 modified "2023-10-16" @default.
- W2079683556 title "Microstructure and property changes induced by substrate rotation in titanium/silicon dual-doped a-C:H films deposited by mid-frequency magnetron sputtering" @default.
- W2079683556 cites W1878474542 @default.
- W2079683556 cites W1964124999 @default.
- W2079683556 cites W1966735754 @default.
- W2079683556 cites W1974578364 @default.
- W2079683556 cites W1975077281 @default.
- W2079683556 cites W1985546802 @default.
- W2079683556 cites W1985933234 @default.
- W2079683556 cites W1987999063 @default.
- W2079683556 cites W1988133629 @default.
- W2079683556 cites W1994568113 @default.
- W2079683556 cites W1997520322 @default.
- W2079683556 cites W2001398713 @default.
- W2079683556 cites W2001605900 @default.
- W2079683556 cites W2003621539 @default.
- W2079683556 cites W2011608908 @default.
- W2079683556 cites W2016185515 @default.
- W2079683556 cites W2017710209 @default.
- W2079683556 cites W2020477783 @default.
- W2079683556 cites W2024117612 @default.
- W2079683556 cites W2026079068 @default.
- W2079683556 cites W2026550289 @default.
- W2079683556 cites W2029872799 @default.
- W2079683556 cites W2029961376 @default.
- W2079683556 cites W2034852236 @default.
- W2079683556 cites W2035805389 @default.
- W2079683556 cites W2049287870 @default.
- W2079683556 cites W2051589320 @default.
- W2079683556 cites W2056695334 @default.
- W2079683556 cites W2058597860 @default.
- W2079683556 cites W2066091261 @default.
- W2079683556 cites W2066160483 @default.
- W2079683556 cites W2068959904 @default.
- W2079683556 cites W2070471610 @default.
- W2079683556 cites W2073539895 @default.
- W2079683556 cites W2074265254 @default.
- W2079683556 cites W2078241687 @default.
- W2079683556 cites W2078737971 @default.
- W2079683556 cites W2083322909 @default.
- W2079683556 cites W2086633221 @default.
- W2079683556 cites W2087753690 @default.
- W2079683556 cites W2090672784 @default.
- W2079683556 cites W2091127692 @default.
- W2079683556 cites W2100213035 @default.
- W2079683556 cites W2133061058 @default.
- W2079683556 cites W2171302889 @default.
- W2079683556 cites W2235679284 @default.
- W2079683556 cites W2247114331 @default.
- W2079683556 doi "https://doi.org/10.1016/j.surfcoat.2013.12.067" @default.
- W2079683556 hasPublicationYear "2014" @default.
- W2079683556 type Work @default.
- W2079683556 sameAs 2079683556 @default.
- W2079683556 citedByCount "9" @default.
- W2079683556 countsByYear W20796835562014 @default.
- W2079683556 countsByYear W20796835562017 @default.
- W2079683556 countsByYear W20796835562021 @default.
- W2079683556 countsByYear W20796835562022 @default.
- W2079683556 countsByYear W20796835562023 @default.
- W2079683556 crossrefType "journal-article" @default.
- W2079683556 hasAuthorship W2079683556A5001885140 @default.
- W2079683556 hasAuthorship W2079683556A5008409694 @default.
- W2079683556 hasAuthorship W2079683556A5018728399 @default.
- W2079683556 hasAuthorship W2079683556A5019397668 @default.
- W2079683556 hasAuthorship W2079683556A5071079144 @default.
- W2079683556 hasAuthorship W2079683556A5090875147 @default.
- W2079683556 hasConcept C111368507 @default.
- W2079683556 hasConcept C127313418 @default.
- W2079683556 hasConcept C159985019 @default.
- W2079683556 hasConcept C171250308 @default.
- W2079683556 hasConcept C185592680 @default.
- W2079683556 hasConcept C19067145 @default.
- W2079683556 hasConcept C191897082 @default.
- W2079683556 hasConcept C192562407 @default.
- W2079683556 hasConcept C22423302 @default.
- W2079683556 hasConcept C2777289219 @default.
- W2079683556 hasConcept C49040817 @default.
- W2079683556 hasConcept C506065880 @default.
- W2079683556 hasConcept C544956773 @default.
- W2079683556 hasConcept C56052488 @default.
- W2079683556 hasConcept C57863236 @default.
- W2079683556 hasConcept C61427134 @default.
- W2079683556 hasConcept C8010536 @default.
- W2079683556 hasConcept C87976508 @default.
- W2079683556 hasConceptScore W2079683556C111368507 @default.
- W2079683556 hasConceptScore W2079683556C127313418 @default.
- W2079683556 hasConceptScore W2079683556C159985019 @default.
- W2079683556 hasConceptScore W2079683556C171250308 @default.
- W2079683556 hasConceptScore W2079683556C185592680 @default.