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- W2079684773 abstract "We have studied focused electron beam induced deposition from W(CO)6 at beam primary energies between 20 and 0.06 keV. Submicrometer resolution with 4 nA beam current was maintained at very low primary energies using a retarding field configuration. Decomposition cross sections of W(CO)6 for primary energies below about 1 keV were found to be about a factor of 4 larger than those at 20 keV. Depending on the scan conditions, the resistivity of the deposits formed using low primary energies was found to be up to about a factor of 4 lower than at 20 keV implying a higher metallic content. These results form the basis of an improved method for repairing clear defects on x-ray masks and for making conducting tracks on semiconducting materials." @default.
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- W2079684773 date "1994-03-14" @default.
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- W2079684773 title "Ultralow-energy focused electron beam induced deposition" @default.
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- W2079684773 doi "https://doi.org/10.1063/1.111912" @default.
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