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- W2079702933 abstract "The effects of mercury and krypton on the glow discharge decomposition of disilane have been studied. It is found that mercury-sensitized plasma decomposition of disilane yields higher deposition rate hydrogenated amorphous silicon (a-Si:H) films. At a deposition rate as high as 60 Å/s no change was observed on the dark and photoconductivities. A similar effect was obtained in krypton-sensitized plasma decomposition of disilane." @default.
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- W2079702933 date "1984-05-15" @default.
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- W2079702933 title "Effects of mercury and krypton on the glow discharge decomposition of disilane" @default.
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