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- W2079702948 abstract "A simple microlens array fabrication process based on chalcogenide glass As-Se and As-S photoresists is described. Specific properties of chalcogenide photoresists important for microlenses preparation and the parameters of fabricated spherical and cylindrical microlens arrays are measured and discussed." @default.
- W2079702948 created "2016-06-24" @default.
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- W2079702948 date "1999-09-17" @default.
- W2079702948 modified "2023-10-16" @default.
- W2079702948 title "<title>Microlens arrays based on chalcogenide glass resists using the proximity microlithography method</title>" @default.
- W2079702948 doi "https://doi.org/10.1117/12.363753" @default.
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