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• W2079706469 abstract "Achieving CD control for sub-100 nm processes will be challenging due to the low-k1 regime that optical patterning approaches will be required to work in. New challenges are expected to arise related to new lithography tools, photoresists, reticle types, and in some cases multiple exposures per layer. This work examines the intra-field CD variations for a range of sub-100 nm resist features patterned by chromeless phase-shift 248-nm lithography. One significant advantage of this patterning technique is that the resist CD's are a function of the exposure dose. This provides the ability to examine the CD variations of a range of linewidths in a single experiment without relying on reticle pattern scaling to determine the linewidth printed on the wafer. In addition to exploring CD control vs feature size, we also examine the full-field depth of focus for these features." @default.
• W2079706469 created "2016-06-24" @default.
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• W2079706469 date "2001-08-22" @default.
• W2079706469 modified "2023-09-23" @default.
• W2079706469 title "Investigation of full-field CD control of sub-100-nm gate features by phase-shift 248-nm lithography" @default.
• W2079706469 doi "https://doi.org/10.1117/12.436759" @default.
• W2079706469 hasPublicationYear "2001" @default.
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