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- W2079706561 abstract "As laser microfabrication develops fast more and more micro parts of MEMS are produced with laser micro processing technology. Excimer laser ablation is a versatile tool for the micro machining of various materials. Excimer laser materials processing, which is performed in most cases using a mask projection system forms a 3D shape by ablation material. Recently a large number of articles about polymer ablation with excimer lasers have appeared. However the powder material especially metallic powder is paid little attention in excimer laser micro machining. In this paper several types of powder material are investigated in excimer laser ablation. The ablation rate of different powder materials with various fluence ranges, wavelengths, and pulse lengths are studied in experiment. The parameters of excimer laser were optimized to fabricate a micro part. The diameter of about 100 micron gear made of nano powder was finally produced with a mask project system using nanopowder. This method is more efficient than laser writing with a focal spot." @default.
- W2079706561 created "2016-06-24" @default.
- W2079706561 creator A5006765107 @default.
- W2079706561 creator A5052146021 @default.
- W2079706561 creator A5058767342 @default.
- W2079706561 creator A5071773009 @default.
- W2079706561 creator A5075941332 @default.
- W2079706561 date "2004-12-30" @default.
- W2079706561 modified "2023-10-16" @default.
- W2079706561 title "The microfabrication using powder materials with excimer laser" @default.
- W2079706561 doi "https://doi.org/10.1117/12.570167" @default.
- W2079706561 hasPublicationYear "2004" @default.
- W2079706561 type Work @default.
- W2079706561 sameAs 2079706561 @default.
- W2079706561 citedByCount "2" @default.
- W2079706561 countsByYear W20797065612014 @default.
- W2079706561 crossrefType "proceedings-article" @default.
- W2079706561 hasAuthorship W2079706561A5006765107 @default.
- W2079706561 hasAuthorship W2079706561A5052146021 @default.
- W2079706561 hasAuthorship W2079706561A5058767342 @default.
- W2079706561 hasAuthorship W2079706561A5071773009 @default.
- W2079706561 hasAuthorship W2079706561A5075941332 @default.
- W2079706561 hasConcept C120665830 @default.
- W2079706561 hasConcept C121332964 @default.
- W2079706561 hasConcept C127413603 @default.
- W2079706561 hasConcept C136525101 @default.
- W2079706561 hasConcept C142724271 @default.
- W2079706561 hasConcept C146978453 @default.
- W2079706561 hasConcept C191897082 @default.
- W2079706561 hasConcept C192562407 @default.
- W2079706561 hasConcept C204787440 @default.
- W2079706561 hasConcept C22078206 @default.
- W2079706561 hasConcept C2778386843 @default.
- W2079706561 hasConcept C2778902805 @default.
- W2079706561 hasConcept C2779188808 @default.
- W2079706561 hasConcept C2780477314 @default.
- W2079706561 hasConcept C2984025587 @default.
- W2079706561 hasConcept C37977207 @default.
- W2079706561 hasConcept C49040817 @default.
- W2079706561 hasConcept C520434653 @default.
- W2079706561 hasConcept C523214423 @default.
- W2079706561 hasConcept C527607 @default.
- W2079706561 hasConcept C71924100 @default.
- W2079706561 hasConcept C74561354 @default.
- W2079706561 hasConceptScore W2079706561C120665830 @default.
- W2079706561 hasConceptScore W2079706561C121332964 @default.
- W2079706561 hasConceptScore W2079706561C127413603 @default.
- W2079706561 hasConceptScore W2079706561C136525101 @default.
- W2079706561 hasConceptScore W2079706561C142724271 @default.
- W2079706561 hasConceptScore W2079706561C146978453 @default.
- W2079706561 hasConceptScore W2079706561C191897082 @default.
- W2079706561 hasConceptScore W2079706561C192562407 @default.
- W2079706561 hasConceptScore W2079706561C204787440 @default.
- W2079706561 hasConceptScore W2079706561C22078206 @default.
- W2079706561 hasConceptScore W2079706561C2778386843 @default.
- W2079706561 hasConceptScore W2079706561C2778902805 @default.
- W2079706561 hasConceptScore W2079706561C2779188808 @default.
- W2079706561 hasConceptScore W2079706561C2780477314 @default.
- W2079706561 hasConceptScore W2079706561C2984025587 @default.
- W2079706561 hasConceptScore W2079706561C37977207 @default.
- W2079706561 hasConceptScore W2079706561C49040817 @default.
- W2079706561 hasConceptScore W2079706561C520434653 @default.
- W2079706561 hasConceptScore W2079706561C523214423 @default.
- W2079706561 hasConceptScore W2079706561C527607 @default.
- W2079706561 hasConceptScore W2079706561C71924100 @default.
- W2079706561 hasConceptScore W2079706561C74561354 @default.
- W2079706561 hasLocation W20797065611 @default.
- W2079706561 hasOpenAccess W2079706561 @default.
- W2079706561 hasPrimaryLocation W20797065611 @default.
- W2079706561 hasRelatedWork W120736926 @default.
- W2079706561 hasRelatedWork W1534999545 @default.
- W2079706561 hasRelatedWork W1630995854 @default.
- W2079706561 hasRelatedWork W180547513 @default.
- W2079706561 hasRelatedWork W2006478358 @default.
- W2079706561 hasRelatedWork W2021990775 @default.
- W2079706561 hasRelatedWork W2034151231 @default.
- W2079706561 hasRelatedWork W2052880054 @default.
- W2079706561 hasRelatedWork W2130130779 @default.
- W2079706561 hasRelatedWork W2415424868 @default.
- W2079706561 isParatext "false" @default.
- W2079706561 isRetracted "false" @default.
- W2079706561 magId "2079706561" @default.
- W2079706561 workType "article" @default.