Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079741325> ?p ?o ?g. }
- W2079741325 endingPage "100" @default.
- W2079741325 startingPage "95" @default.
- W2079741325 abstract "Silicon on insulator (SOI) structures have been formed by nitrogen or oxygen implantation with a dose of 1.8 × 1018 ions/cm2 at 190–200 keV. Infrared (IR) absorption and reflection spectra in the wavenumber range 400–5000 cm−1 were measured for SOI structures after various thermal anneal treatments. Localized vibrational modes and interference fringes were observed in the IR spectra. By IR absorption and thermodynamic analysis, it was found that crystalline α-Si3N4 was formed in the buried nitride layer of SOI structure after annealing at 1200°C for 2 h. However, the buried layer formed by oxygen implantation was still amorphous SiO2 after annealing at 1300°C for 5 h. By detailed theoretical analysis and computer simulation of the IR reflection interference spectra, refractive index profiles of SOI structures were obtained." @default.
- W2079741325 created "2016-06-24" @default.
- W2079741325 creator A5000933267 @default.
- W2079741325 creator A5045573181 @default.
- W2079741325 creator A5046474391 @default.
- W2079741325 creator A5073959198 @default.
- W2079741325 creator A5089220011 @default.
- W2079741325 date "1989-05-01" @default.
- W2079741325 modified "2023-10-16" @default.
- W2079741325 title "Infrared absorption and reflection spectroscopic studies of SOI structures formed by oxygen or nitrogen implantation" @default.
- W2079741325 cites W1963850614 @default.
- W2079741325 cites W1984531181 @default.
- W2079741325 cites W1994158144 @default.
- W2079741325 cites W2052774894 @default.
- W2079741325 cites W2076201595 @default.
- W2079741325 cites W2098514665 @default.
- W2079741325 doi "https://doi.org/10.1016/0167-577x(89)90135-3" @default.
- W2079741325 hasPublicationYear "1989" @default.
- W2079741325 type Work @default.
- W2079741325 sameAs 2079741325 @default.
- W2079741325 citedByCount "10" @default.
- W2079741325 countsByYear W20797413252022 @default.
- W2079741325 crossrefType "journal-article" @default.
- W2079741325 hasAuthorship W2079741325A5000933267 @default.
- W2079741325 hasAuthorship W2079741325A5045573181 @default.
- W2079741325 hasAuthorship W2079741325A5046474391 @default.
- W2079741325 hasAuthorship W2079741325A5073959198 @default.
- W2079741325 hasAuthorship W2079741325A5089220011 @default.
- W2079741325 hasConcept C113196181 @default.
- W2079741325 hasConcept C119824511 @default.
- W2079741325 hasConcept C120665830 @default.
- W2079741325 hasConcept C121332964 @default.
- W2079741325 hasConcept C1276947 @default.
- W2079741325 hasConcept C145148216 @default.
- W2079741325 hasConcept C153642686 @default.
- W2079741325 hasConcept C158355884 @default.
- W2079741325 hasConcept C159985019 @default.
- W2079741325 hasConcept C171250308 @default.
- W2079741325 hasConcept C178790620 @default.
- W2079741325 hasConcept C185592680 @default.
- W2079741325 hasConcept C192562407 @default.
- W2079741325 hasConcept C194760766 @default.
- W2079741325 hasConcept C2777855556 @default.
- W2079741325 hasConcept C2779227376 @default.
- W2079741325 hasConcept C41823505 @default.
- W2079741325 hasConcept C42067758 @default.
- W2079741325 hasConcept C43617362 @default.
- W2079741325 hasConcept C4839761 @default.
- W2079741325 hasConcept C49040817 @default.
- W2079741325 hasConcept C53143962 @default.
- W2079741325 hasConcept C540031477 @default.
- W2079741325 hasConcept C544956773 @default.
- W2079741325 hasConcept C56052488 @default.
- W2079741325 hasConcept C8010536 @default.
- W2079741325 hasConceptScore W2079741325C113196181 @default.
- W2079741325 hasConceptScore W2079741325C119824511 @default.
- W2079741325 hasConceptScore W2079741325C120665830 @default.
- W2079741325 hasConceptScore W2079741325C121332964 @default.
- W2079741325 hasConceptScore W2079741325C1276947 @default.
- W2079741325 hasConceptScore W2079741325C145148216 @default.
- W2079741325 hasConceptScore W2079741325C153642686 @default.
- W2079741325 hasConceptScore W2079741325C158355884 @default.
- W2079741325 hasConceptScore W2079741325C159985019 @default.
- W2079741325 hasConceptScore W2079741325C171250308 @default.
- W2079741325 hasConceptScore W2079741325C178790620 @default.
- W2079741325 hasConceptScore W2079741325C185592680 @default.
- W2079741325 hasConceptScore W2079741325C192562407 @default.
- W2079741325 hasConceptScore W2079741325C194760766 @default.
- W2079741325 hasConceptScore W2079741325C2777855556 @default.
- W2079741325 hasConceptScore W2079741325C2779227376 @default.
- W2079741325 hasConceptScore W2079741325C41823505 @default.
- W2079741325 hasConceptScore W2079741325C42067758 @default.
- W2079741325 hasConceptScore W2079741325C43617362 @default.
- W2079741325 hasConceptScore W2079741325C4839761 @default.
- W2079741325 hasConceptScore W2079741325C49040817 @default.
- W2079741325 hasConceptScore W2079741325C53143962 @default.
- W2079741325 hasConceptScore W2079741325C540031477 @default.
- W2079741325 hasConceptScore W2079741325C544956773 @default.
- W2079741325 hasConceptScore W2079741325C56052488 @default.
- W2079741325 hasConceptScore W2079741325C8010536 @default.
- W2079741325 hasIssue "3-4" @default.
- W2079741325 hasLocation W20797413251 @default.
- W2079741325 hasOpenAccess W2079741325 @default.
- W2079741325 hasPrimaryLocation W20797413251 @default.
- W2079741325 hasRelatedWork W2041833038 @default.
- W2079741325 hasRelatedWork W2042925312 @default.
- W2079741325 hasRelatedWork W2044409345 @default.
- W2079741325 hasRelatedWork W2074003831 @default.
- W2079741325 hasRelatedWork W2078263247 @default.
- W2079741325 hasRelatedWork W2079671646 @default.
- W2079741325 hasRelatedWork W2088081281 @default.
- W2079741325 hasRelatedWork W2094221410 @default.
- W2079741325 hasRelatedWork W4319962741 @default.
- W2079741325 hasRelatedWork W927047953 @default.
- W2079741325 hasVolume "8" @default.
- W2079741325 isParatext "false" @default.
- W2079741325 isRetracted "false" @default.
- W2079741325 magId "2079741325" @default.