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- W2079744045 abstract "The sol-gel technique has been used to produce perovskite PZT thin films on lattice-matched SBN:60 and LaAlO<SUB>3</SUB> substrates. These films were spin-coated and then annealed in the range of 500-700 degrees C in an oxygen atmosphere. Highly grain oriented films showed high polarization and the potential for a large electro-optic response.In all cases, the PZT thin films were highly crystalline, with dielectric constants > 1300. PZT films were also deposited on Pt- metallized Si using the same deposition technique in order to establish the effect of annealing conditions on the formation of pyrochlore phase." @default.
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- W2079744045 date "1997-04-11" @default.
- W2079744045 modified "2023-10-14" @default.
- W2079744045 title "<title>Ferroelectric PZT thin films on Si and SBN substrates</title>" @default.
- W2079744045 doi "https://doi.org/10.1117/12.271434" @default.
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