Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079746793> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2079746793 abstract "By adopting new capacitance reading scheme, a capacitive type uncooled infrared detector structure with high fill-factor and effectively controllable thermal conductance is proposed. Instead of conventional MEMS capacitor structure (i.e. an insulating gap between top and bottom electrodes), a capacitor with a floating electrode and two bottom electrodes has been applied to the infrared detector. Infrared absorber which also acts as the floating electrode of the capacitor is connected to the substrate via two bimaterial legs. These legs consist of two materials having large difference in thermal expansion coefficient (Al: 25ppm/K and SiO<sub>2</sub>: 0.35ppm/K), so that the legs are deflected according to the certain temperature change due to the infrared absorption. This leg's movement results in the displacement of the top electrode of the capacitor, and infrared is sensed by measuring the capacitance change. However, the one end tip of the bimaterial leg does not contain Al and consist of SiO<sub>2</sub>, solely. This leg design enables the absorber to be separated from the substrate thermally as well as electrically, because insulators usually have low thermal conductivity than metals more than an order. The capacitance change by the result of infrared absorption is read only through two bottom electrodes which are placed right under the absorber, and also perform as infrared reflectors. The design has advantages of enlarging fill-factor of the infrared detector, effective thermal conductance controlling and high sensitivity to IR. With only small dimensions of SiO<sub>2</sub> (10μm x 2μm x 0.2μm), the device can have low thermal conductance of 1.3x10<sup>-7</sup>W/K, so that the portion of the legs can be reduced in a pixel area. The device has fill-factor of 0.77 and 14%/K of sensitivity to infrared rays concerning 1~2K of temperature difference between the structure and the substrate." @default.
- W2079746793 created "2016-06-24" @default.
- W2079746793 creator A5002245852 @default.
- W2079746793 creator A5003136662 @default.
- W2079746793 creator A5010786841 @default.
- W2079746793 creator A5020515113 @default.
- W2079746793 creator A5086997980 @default.
- W2079746793 creator A5090115813 @default.
- W2079746793 date "2007-04-27" @default.
- W2079746793 modified "2023-10-14" @default.
- W2079746793 title "A high fill-factor uncooled infrared detector with thermo-mechanical bimaterial structure" @default.
- W2079746793 doi "https://doi.org/10.1117/12.719207" @default.
- W2079746793 hasPublicationYear "2007" @default.
- W2079746793 type Work @default.
- W2079746793 sameAs 2079746793 @default.
- W2079746793 citedByCount "3" @default.
- W2079746793 countsByYear W20797467932012 @default.
- W2079746793 countsByYear W20797467932013 @default.
- W2079746793 countsByYear W20797467932019 @default.
- W2079746793 crossrefType "proceedings-article" @default.
- W2079746793 hasAuthorship W2079746793A5002245852 @default.
- W2079746793 hasAuthorship W2079746793A5003136662 @default.
- W2079746793 hasAuthorship W2079746793A5010786841 @default.
- W2079746793 hasAuthorship W2079746793A5020515113 @default.
- W2079746793 hasAuthorship W2079746793A5086997980 @default.
- W2079746793 hasAuthorship W2079746793A5090115813 @default.
- W2079746793 hasConcept C111368507 @default.
- W2079746793 hasConcept C119599485 @default.
- W2079746793 hasConcept C120665830 @default.
- W2079746793 hasConcept C121332964 @default.
- W2079746793 hasConcept C125287762 @default.
- W2079746793 hasConcept C127313418 @default.
- W2079746793 hasConcept C127413603 @default.
- W2079746793 hasConcept C158355884 @default.
- W2079746793 hasConcept C159985019 @default.
- W2079746793 hasConcept C165801399 @default.
- W2079746793 hasConcept C17525397 @default.
- W2079746793 hasConcept C192562407 @default.
- W2079746793 hasConcept C206755178 @default.
- W2079746793 hasConcept C2777289219 @default.
- W2079746793 hasConcept C2779818494 @default.
- W2079746793 hasConcept C30066665 @default.
- W2079746793 hasConcept C47463417 @default.
- W2079746793 hasConcept C49040817 @default.
- W2079746793 hasConcept C52192207 @default.
- W2079746793 hasConcept C62520636 @default.
- W2079746793 hasConcept C94915269 @default.
- W2079746793 hasConcept C97346530 @default.
- W2079746793 hasConceptScore W2079746793C111368507 @default.
- W2079746793 hasConceptScore W2079746793C119599485 @default.
- W2079746793 hasConceptScore W2079746793C120665830 @default.
- W2079746793 hasConceptScore W2079746793C121332964 @default.
- W2079746793 hasConceptScore W2079746793C125287762 @default.
- W2079746793 hasConceptScore W2079746793C127313418 @default.
- W2079746793 hasConceptScore W2079746793C127413603 @default.
- W2079746793 hasConceptScore W2079746793C158355884 @default.
- W2079746793 hasConceptScore W2079746793C159985019 @default.
- W2079746793 hasConceptScore W2079746793C165801399 @default.
- W2079746793 hasConceptScore W2079746793C17525397 @default.
- W2079746793 hasConceptScore W2079746793C192562407 @default.
- W2079746793 hasConceptScore W2079746793C206755178 @default.
- W2079746793 hasConceptScore W2079746793C2777289219 @default.
- W2079746793 hasConceptScore W2079746793C2779818494 @default.
- W2079746793 hasConceptScore W2079746793C30066665 @default.
- W2079746793 hasConceptScore W2079746793C47463417 @default.
- W2079746793 hasConceptScore W2079746793C49040817 @default.
- W2079746793 hasConceptScore W2079746793C52192207 @default.
- W2079746793 hasConceptScore W2079746793C62520636 @default.
- W2079746793 hasConceptScore W2079746793C94915269 @default.
- W2079746793 hasConceptScore W2079746793C97346530 @default.
- W2079746793 hasLocation W20797467931 @default.
- W2079746793 hasOpenAccess W2079746793 @default.
- W2079746793 hasPrimaryLocation W20797467931 @default.
- W2079746793 hasRelatedWork W1559472201 @default.
- W2079746793 hasRelatedWork W2051563071 @default.
- W2079746793 hasRelatedWork W2060676714 @default.
- W2079746793 hasRelatedWork W2154140536 @default.
- W2079746793 hasRelatedWork W2290345481 @default.
- W2079746793 hasRelatedWork W2354467501 @default.
- W2079746793 hasRelatedWork W2811130265 @default.
- W2079746793 hasRelatedWork W3008169960 @default.
- W2079746793 hasRelatedWork W3210048459 @default.
- W2079746793 hasRelatedWork W4253731651 @default.
- W2079746793 isParatext "false" @default.
- W2079746793 isRetracted "false" @default.
- W2079746793 magId "2079746793" @default.
- W2079746793 workType "article" @default.