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• W2079764726 endingPage "2465" @default.
• W2079764726 startingPage "2462" @default.
• W2079764726 abstract "Abstract This work deals with the high-rate and dust-free formation of carbon-containing silicon oxide (SiOC) coatings in open air without substrate heating using an atmospheric-pressure (AP) plasma jet. The AP plasma was excited by a 13.56-MHz radio frequency (RF) power. Hexamethyldisiloxane and oxygen (O2) were used as the source gases. By optimizing the O2 flow rate and RF power, SiOC films were readily fabricated at deposition rates higher than 100 nm/s without suffering from particulate contaminations of the film surface. Additionally, an inorganic SiO2-like film exhibiting O/Si atomic ratio of approximately 2 was obtained at a deposition rate of ~ 13 nm/s, the value of which is still greater than those obtained in other AP plasma sources. Further systematic studies are needed to see if good-quality inorganic SiO2-like films can be obtained with higher rates." @default.
• W2079764726 created "2016-06-24" @default.
• W2079764726 creator A5019078663 @default.
• W2079764726 creator A5058996204 @default.
• W2079764726 creator A5062972382 @default.
• W2079764726 creator A5078145270 @default.
• W2079764726 creator A5085608175 @default.
• W2079764726 creator A5088173317 @default.
• W2079764726 date "2012-09-01" @default.
• W2079764726 modified "2023-10-06" @default.
• W2079764726 title "High-rate HMDSO-based coatings in open air using atmospheric-pressure plasma jet" @default.
• W2079764726 cites W121737710 @default.
• W2079764726 cites W1967299860 @default.
• W2079764726 cites W1974782349 @default.
• W2079764726 cites W1985112930 @default.
• W2079764726 cites W1987456798 @default.
• W2079764726 cites W1999142619 @default.
• W2079764726 cites W2004193662 @default.
• W2079764726 cites W2008049654 @default.
• W2079764726 cites W2025805824 @default.
• W2079764726 cites W2028180387 @default.
• W2079764726 cites W2028482727 @default.
• W2079764726 cites W2031157439 @default.
• W2079764726 cites W2031919590 @default.
• W2079764726 cites W2033908464 @default.
• W2079764726 cites W2036061631 @default.
• W2079764726 cites W2047211709 @default.
• W2079764726 cites W2047528710 @default.
• W2079764726 cites W2049787191 @default.
• W2079764726 cites W2059426462 @default.
• W2079764726 cites W2060575514 @default.
• W2079764726 cites W2070611256 @default.
• W2079764726 cites W2070828767 @default.
• W2079764726 cites W2076002616 @default.
• W2079764726 cites W2078193303 @default.
• W2079764726 cites W2078204843 @default.
• W2079764726 cites W2081414544 @default.
• W2079764726 cites W2103432557 @default.
• W2079764726 cites W2128202165 @default.
• W2079764726 cites W2297418433 @default.
• W2079764726 doi "https://doi.org/10.1016/j.jnoncrysol.2011.12.081" @default.
• W2079764726 hasPublicationYear "2012" @default.
• W2079764726 type Work @default.
• W2079764726 sameAs 2079764726 @default.
• W2079764726 citedByCount "16" @default.
• W2079764726 countsByYear W20797647262013 @default.
• W2079764726 countsByYear W20797647262015 @default.
• W2079764726 countsByYear W20797647262016 @default.
• W2079764726 countsByYear W20797647262017 @default.
• W2079764726 countsByYear W20797647262018 @default.
• W2079764726 countsByYear W20797647262019 @default.
• W2079764726 countsByYear W20797647262020 @default.
• W2079764726 countsByYear W20797647262021 @default.
• W2079764726 countsByYear W20797647262022 @default.
• W2079764726 countsByYear W20797647262023 @default.
• W2079764726 crossrefType "journal-article" @default.
• W2079764726 hasAuthorship W2079764726A5019078663 @default.
• W2079764726 hasAuthorship W2079764726A5058996204 @default.
• W2079764726 hasAuthorship W2079764726A5062972382 @default.
• W2079764726 hasAuthorship W2079764726A5078145270 @default.
• W2079764726 hasAuthorship W2079764726A5085608175 @default.
• W2079764726 hasAuthorship W2079764726A5088173317 @default.
• W2079764726 hasConcept C119947313 @default.
• W2079764726 hasConcept C121332964 @default.
• W2079764726 hasConcept C127413603 @default.
• W2079764726 hasConcept C153294291 @default.
• W2079764726 hasConcept C170154142 @default.
• W2079764726 hasConcept C185544564 @default.
• W2079764726 hasConcept C192562407 @default.
• W2079764726 hasConcept C200239111 @default.
• W2079764726 hasConcept C2991722673 @default.
• W2079764726 hasConcept C39432304 @default.
• W2079764726 hasConcept C57879066 @default.
• W2079764726 hasConcept C82706917 @default.
• W2079764726 hasConcept C85344455 @default.
• W2079764726 hasConcept C91586092 @default.
• W2079764726 hasConceptScore W2079764726C119947313 @default.
• W2079764726 hasConceptScore W2079764726C121332964 @default.
• W2079764726 hasConceptScore W2079764726C127413603 @default.
• W2079764726 hasConceptScore W2079764726C153294291 @default.
• W2079764726 hasConceptScore W2079764726C170154142 @default.
• W2079764726 hasConceptScore W2079764726C185544564 @default.
• W2079764726 hasConceptScore W2079764726C192562407 @default.
• W2079764726 hasConceptScore W2079764726C200239111 @default.
• W2079764726 hasConceptScore W2079764726C2991722673 @default.
• W2079764726 hasConceptScore W2079764726C39432304 @default.
• W2079764726 hasConceptScore W2079764726C57879066 @default.
• W2079764726 hasConceptScore W2079764726C82706917 @default.
• W2079764726 hasConceptScore W2079764726C85344455 @default.
• W2079764726 hasConceptScore W2079764726C91586092 @default.
• W2079764726 hasFunder F4320320912 @default.
• W2079764726 hasFunder F4320334764 @default.
• W2079764726 hasIssue "17" @default.
• W2079764726 hasLocation W20797647261 @default.
• W2079764726 hasOpenAccess W2079764726 @default.
• W2079764726 hasPrimaryLocation W20797647261 @default.
• W2079764726 hasRelatedWork W1532838940 @default.
• W2079764726 hasRelatedWork W1964010674 @default.

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