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- W2079766125 abstract "We report the use of Al-doped ZnO (AZO) as the current spreading layer for AlGaInP-based light-emitting diodes (LEDs). It was found that AZO could form good ohmic contact with AuBe-diffused p-GaP. It was also found that the specific contact resistance could be further reduced from 2.68×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-4</sup> to 1.52×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-4</sup> Ω-cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> by performing rapid thermal annealing at 400 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>°</sup> C for 5 min in N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ambient. Furthermore, it was found that output power of the LEDs with AZO current spreading layer was 6.2% larger than that of the LEDs with indium-tin-oxide current spreading layer. It was also found that LEDs with AZO current spreading layer also exhibit good electrical properties and good reliability." @default.
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- W2079766125 date "2013-10-01" @default.
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- W2079766125 title "AlGaInP-Based LEDs With AuBe-Diffused AZO/GaP Current Spreading Layer" @default.
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- W2079766125 doi "https://doi.org/10.1109/jqe.2013.2280065" @default.
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