FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079769719> ?p ?o ?g. }

• W2079769719 endingPage "94" @default.
• W2079769719 startingPage "86" @default.
• W2079769719 abstract "A family of water-soluble, negative-tone, high-resolution, chemically amplified photoresists based on partially or fully deprotected poly(1,2:5,6-di-O-isopropylidene-3-O-methacryloyl-α-d-glucofuranose) is described. Both the molecular weight of the parent ketal-protected polymer and the extent of its deprotection to a water-soluble polymer containing 3-O-methacryloyl-d-glucopyranose repeat units must be carefully controlled to provide good coating and imaging properties. The two ketal protecting groups of the poly(1,2:5,6-di-O-isopropylidene-α-d-glucofuranose) have different reactivity, and their complete removal requires long reaction times under hydrolytic conditions. The detailed deprotection chemistry of the polymer is readily understood through model studies with the fully and partially protected analogues of the polymer pendant groups: 1,2:5,6-di-O-isopropylidene-α-d-glucofuranose and 1,2-isopropylidene-α-d-glucopyranose. When combined with a water-soluble photochemical precursor of acid such as (4-methoxyphenyl)dimethylsulfonium trifluoromethanesulfonate, films of the deprotected or partially deprotected poly(1,2:5,6-di-O-isopropylidene-3-O-methacryloyl-α-d-glucofuranose) undergo acid-catalyzed cross-linking. The enhanced performance of the partially deprotected polymers over that of poly(3-O-methacryloyl-d-glucopyranose) suggests that the presence of remaining hydrophobic groups that afford water dispersibility rather than full solubility may be key to their performance. Imaged negative-tone features as small as 0.2 μm are obtained with these materials that have sensitivities of ca. 30 mJ/cm2 with wholly aqueous casting and processing." @default.
• W2079769719 created "2016-06-24" @default.
• W2079769719 creator A5002152167 @default.
• W2079769719 creator A5006237410 @default.
• W2079769719 creator A5013579188 @default.
• W2079769719 creator A5027381116 @default.
• W2079769719 creator A5041529071 @default.
• W2079769719 creator A5070535511 @default.
• W2079769719 date "1998-12-17" @default.
• W2079769719 modified "2023-09-26" @default.
• W2079769719 title "Photoresists with Reduced Environmental Impact: Water-Soluble Resists Based on Photo-Cross-Linking of a Sugar-Containing Polymethacrylate" @default.
• W2079769719 cites W1482490129 @default.
• W2079769719 cites W1537907416 @default.
• W2079769719 cites W1874972347 @default.
• W2079769719 cites W1971813167 @default.
• W2079769719 cites W1975573185 @default.
• W2079769719 cites W1988156143 @default.
• W2079769719 cites W1988770626 @default.
• W2079769719 cites W1995528667 @default.
• W2079769719 cites W1996650218 @default.
• W2079769719 cites W2004431477 @default.
• W2079769719 cites W2006707484 @default.
• W2079769719 cites W2015911412 @default.
• W2079769719 cites W2017822192 @default.
• W2079769719 cites W2035473126 @default.
• W2079769719 cites W2039957684 @default.
• W2079769719 cites W2040697929 @default.
• W2079769719 cites W2044569651 @default.
• W2079769719 cites W2045443576 @default.
• W2079769719 cites W2054818272 @default.
• W2079769719 cites W2054821801 @default.
• W2079769719 cites W2055545671 @default.
• W2079769719 cites W2069605351 @default.
• W2079769719 cites W2075889816 @default.
• W2079769719 cites W2081437499 @default.
• W2079769719 cites W2089448777 @default.
• W2079769719 cites W2122644482 @default.
• W2079769719 cites W2125742641 @default.
• W2079769719 cites W2130739983 @default.
• W2079769719 cites W2145930691 @default.
• W2079769719 cites W2322372931 @default.
• W2079769719 cites W2330242830 @default.
• W2079769719 cites W2494946022 @default.
• W2079769719 cites W2953198311 @default.
• W2079769719 cites W3176830829 @default.
• W2079769719 cites W4236102394 @default.
• W2079769719 doi "https://doi.org/10.1021/ma981372j" @default.
• W2079769719 hasPublicationYear "1998" @default.
• W2079769719 type Work @default.
• W2079769719 sameAs 2079769719 @default.
• W2079769719 citedByCount "29" @default.
• W2079769719 countsByYear W20797697192012 @default.
• W2079769719 countsByYear W20797697192013 @default.
• W2079769719 countsByYear W20797697192014 @default.
• W2079769719 countsByYear W20797697192018 @default.
• W2079769719 countsByYear W20797697192022 @default.
• W2079769719 countsByYear W20797697192023 @default.
• W2079769719 crossrefType "journal-article" @default.
• W2079769719 hasAuthorship W2079769719A5002152167 @default.
• W2079769719 hasAuthorship W2079769719A5006237410 @default.
• W2079769719 hasAuthorship W2079769719A5013579188 @default.
• W2079769719 hasAuthorship W2079769719A5027381116 @default.
• W2079769719 hasAuthorship W2079769719A5041529071 @default.
• W2079769719 hasAuthorship W2079769719A5070535511 @default.
• W2079769719 hasConcept C155574463 @default.
• W2079769719 hasConcept C161790260 @default.
• W2079769719 hasConcept C178790620 @default.
• W2079769719 hasConcept C184651966 @default.
• W2079769719 hasConcept C185592680 @default.
• W2079769719 hasConcept C188027245 @default.
• W2079769719 hasConcept C21774173 @default.
• W2079769719 hasConcept C521977710 @default.
• W2079769719 hasConcept C94412978 @default.
• W2079769719 hasConceptScore W2079769719C155574463 @default.
• W2079769719 hasConceptScore W2079769719C161790260 @default.
• W2079769719 hasConceptScore W2079769719C178790620 @default.
• W2079769719 hasConceptScore W2079769719C184651966 @default.
• W2079769719 hasConceptScore W2079769719C185592680 @default.
• W2079769719 hasConceptScore W2079769719C188027245 @default.
• W2079769719 hasConceptScore W2079769719C21774173 @default.
• W2079769719 hasConceptScore W2079769719C521977710 @default.
• W2079769719 hasConceptScore W2079769719C94412978 @default.
• W2079769719 hasIssue "1" @default.
• W2079769719 hasLocation W20797697191 @default.
• W2079769719 hasOpenAccess W2079769719 @default.
• W2079769719 hasPrimaryLocation W20797697191 @default.
• W2079769719 hasRelatedWork W1970144168 @default.
• W2079769719 hasRelatedWork W1993274142 @default.
• W2079769719 hasRelatedWork W2095581038 @default.
• W2079769719 hasRelatedWork W2326430580 @default.
• W2079769719 hasRelatedWork W2334811087 @default.
• W2079769719 hasRelatedWork W2366007549 @default.
• W2079769719 hasRelatedWork W2403182174 @default.
• W2079769719 hasRelatedWork W2949080510 @default.
• W2079769719 hasRelatedWork W2949500570 @default.
• W2079769719 hasRelatedWork W2951272254 @default.
• W2079769719 hasVolume "32" @default.
• W2079769719 isParatext "false" @default.

• next