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- W2079811255 abstract "A six-axis Micromachined Electrostatically Suspended Accelerometer (MESA) which is based on LIGA-type microfabrication was designed. MESA employs a levitated perforated plate as its proof mass. Three main purposes are considered for the design of the perforated proof mass: (1) reducing squeeze-film effect; (2) improving the dynamic response of MESA; (3) facilitating the etching of sacrificial layer under the plate. This paper utilized a finite element model for evaluating air squeeze film damping effect of perforated proof mass. Among several designs of perforated proof mass, the best choice was found. Besides, a system-level model created in CoventorWare is used to evaluate the effect of squeeze film damping and the dynamic response of the MESA." @default.
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- W2079811255 date "2011-08-01" @default.
- W2079811255 modified "2023-09-23" @default.
- W2079811255 title "Design of Proof Mass and System-Level Simulation of a Micromachined Electrostatically Suspended Accelerometer" @default.
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- W2079811255 doi "https://doi.org/10.4028/www.scientific.net/amr.317-319.1631" @default.
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