Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079844520> ?p ?o ?g. }
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98
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- W2079844520 endingPage "306" @default.
- W2079844520 startingPage "299" @default.
- W2079844520 abstract "Thermal desorption of surface oxide from silicon wafers has been studied in ultrahigh vacuum and in hydrogen by secondary-ion mass spectrometry. Heating in 132 Pa hydrogen virtually eliminates residual boron contamination which creates a p-type surface layer on vacuum-annealed wafers. Lower pressures of hydrogen and substitution of nitrogen have proved less efficient in reducing surface boron concentration. In-situ ellipsometry indicates differences in reaction kinetics for oxide desorption in vacuum and in hydrogen." @default.
- W2079844520 created "2016-06-24" @default.
- W2079844520 creator A5005104182 @default.
- W2079844520 creator A5034203712 @default.
- W2079844520 creator A5044454370 @default.
- W2079844520 creator A5074689956 @default.
- W2079844520 creator A5081568154 @default.
- W2079844520 date "1989-12-01" @default.
- W2079844520 modified "2023-10-16" @default.
- W2079844520 title "The measurement of surface boron on silicon wafers annealed in vacuum and gas ambients" @default.
- W2079844520 cites W1969768461 @default.
- W2079844520 cites W1978240244 @default.
- W2079844520 cites W2005148380 @default.
- W2079844520 cites W2027373393 @default.
- W2079844520 cites W2045603780 @default.
- W2079844520 cites W2055701216 @default.
- W2079844520 cites W2055739055 @default.
- W2079844520 cites W2061588144 @default.
- W2079844520 cites W2066623881 @default.
- W2079844520 cites W2066826676 @default.
- W2079844520 cites W2082895348 @default.
- W2079844520 cites W2143401671 @default.
- W2079844520 cites W2158789315 @default.
- W2079844520 doi "https://doi.org/10.1016/0040-6090(89)90454-9" @default.
- W2079844520 hasPublicationYear "1989" @default.
- W2079844520 type Work @default.
- W2079844520 sameAs 2079844520 @default.
- W2079844520 citedByCount "11" @default.
- W2079844520 countsByYear W20798445202015 @default.
- W2079844520 crossrefType "journal-article" @default.
- W2079844520 hasAuthorship W2079844520A5005104182 @default.
- W2079844520 hasAuthorship W2079844520A5034203712 @default.
- W2079844520 hasAuthorship W2079844520A5044454370 @default.
- W2079844520 hasAuthorship W2079844520A5074689956 @default.
- W2079844520 hasAuthorship W2079844520A5081568154 @default.
- W2079844520 hasConcept C1012414 @default.
- W2079844520 hasConcept C113196181 @default.
- W2079844520 hasConcept C147789679 @default.
- W2079844520 hasConcept C150394285 @default.
- W2079844520 hasConcept C160671074 @default.
- W2079844520 hasConcept C162356407 @default.
- W2079844520 hasConcept C162711632 @default.
- W2079844520 hasConcept C171250308 @default.
- W2079844520 hasConcept C178790620 @default.
- W2079844520 hasConcept C185592680 @default.
- W2079844520 hasConcept C191897082 @default.
- W2079844520 hasConcept C192562407 @default.
- W2079844520 hasConcept C2779851234 @default.
- W2079844520 hasConcept C2781059571 @default.
- W2079844520 hasConcept C43617362 @default.
- W2079844520 hasConcept C501308230 @default.
- W2079844520 hasConcept C512968161 @default.
- W2079844520 hasConcept C537208039 @default.
- W2079844520 hasConcept C544956773 @default.
- W2079844520 hasConcept C77671233 @default.
- W2079844520 hasConcept C82225425 @default.
- W2079844520 hasConceptScore W2079844520C1012414 @default.
- W2079844520 hasConceptScore W2079844520C113196181 @default.
- W2079844520 hasConceptScore W2079844520C147789679 @default.
- W2079844520 hasConceptScore W2079844520C150394285 @default.
- W2079844520 hasConceptScore W2079844520C160671074 @default.
- W2079844520 hasConceptScore W2079844520C162356407 @default.
- W2079844520 hasConceptScore W2079844520C162711632 @default.
- W2079844520 hasConceptScore W2079844520C171250308 @default.
- W2079844520 hasConceptScore W2079844520C178790620 @default.
- W2079844520 hasConceptScore W2079844520C185592680 @default.
- W2079844520 hasConceptScore W2079844520C191897082 @default.
- W2079844520 hasConceptScore W2079844520C192562407 @default.
- W2079844520 hasConceptScore W2079844520C2779851234 @default.
- W2079844520 hasConceptScore W2079844520C2781059571 @default.
- W2079844520 hasConceptScore W2079844520C43617362 @default.
- W2079844520 hasConceptScore W2079844520C501308230 @default.
- W2079844520 hasConceptScore W2079844520C512968161 @default.
- W2079844520 hasConceptScore W2079844520C537208039 @default.
- W2079844520 hasConceptScore W2079844520C544956773 @default.
- W2079844520 hasConceptScore W2079844520C77671233 @default.
- W2079844520 hasConceptScore W2079844520C82225425 @default.
- W2079844520 hasIssue "1-2" @default.
- W2079844520 hasLocation W20798445201 @default.
- W2079844520 hasOpenAccess W2079844520 @default.
- W2079844520 hasPrimaryLocation W20798445201 @default.
- W2079844520 hasRelatedWork W1987228085 @default.
- W2079844520 hasRelatedWork W1989052695 @default.
- W2079844520 hasRelatedWork W2000807817 @default.
- W2079844520 hasRelatedWork W2002210549 @default.
- W2079844520 hasRelatedWork W2076590016 @default.
- W2079844520 hasRelatedWork W2079844520 @default.
- W2079844520 hasRelatedWork W2086011292 @default.
- W2079844520 hasRelatedWork W2091151710 @default.
- W2079844520 hasRelatedWork W2115089515 @default.
- W2079844520 hasRelatedWork W2324399761 @default.
- W2079844520 hasVolume "183" @default.
- W2079844520 isParatext "false" @default.
- W2079844520 isRetracted "false" @default.
- W2079844520 magId "2079844520" @default.
- W2079844520 workType "article" @default.