FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079852416> ?p ?o ?g. }

• W2079852416 endingPage "226" @default.
• W2079852416 startingPage "218" @default.
• W2079852416 abstract "The deposition of in situ boron doped silicon films from boron trichloride BCl3 and silane SiH4 in a conventional low-pressure chemical vapour deposition reactor has been studied for high boron doping levels and two kinds of substrates (SiO2 and Si3N4). On the basis of transmission electron microscopy and X-ray photoelectron spectroscopy results, these films appear to be highly sensitive to the local electronic environment of both substrate and deposited atoms. Indeed, beyond a critical doping level, this material becomes more and more amorphous, due to the occurrence of a particular organization of boron atoms in the silicon matrix. This behaviour results in a lowering of the well-known boron enhancement effect for deposition rate and crystalline fraction." @default.
• W2079852416 created "2016-06-24" @default.
• W2079852416 creator A5014113718 @default.
• W2079852416 creator A5077858175 @default.
• W2079852416 creator A5083478106 @default.
• W2079852416 creator A5086552836 @default.
• W2079852416 date "2004-01-01" @default.
• W2079852416 modified "2023-10-07" @default.
• W2079852416 title "Influence of dopant concentration and type of substrate on the local organization of low-pressure chemical vapour deposition in situ boron doped silicon films from silane and boron trichloride" @default.
• W2079852416 cites W1528655264 @default.
• W2079852416 cites W1967731314 @default.
• W2079852416 cites W1977351678 @default.
• W2079852416 cites W1978350182 @default.
• W2079852416 cites W2013021638 @default.
• W2079852416 cites W2014623839 @default.
• W2079852416 cites W2014904535 @default.
• W2079852416 cites W2025566498 @default.
• W2079852416 cites W2047134103 @default.
• W2079852416 cites W2067005003 @default.
• W2079852416 cites W2073566405 @default.
• W2079852416 cites W2074963052 @default.
• W2079852416 cites W2084205552 @default.
• W2079852416 cites W2093982185 @default.
• W2079852416 cites W2099646352 @default.
• W2079852416 cites W2146982919 @default.
• W2079852416 doi "https://doi.org/10.1016/j.tsf.2003.10.010" @default.
• W2079852416 hasPublicationYear "2004" @default.
• W2079852416 type Work @default.
• W2079852416 sameAs 2079852416 @default.
• W2079852416 citedByCount "6" @default.
• W2079852416 countsByYear W20798524162013 @default.
• W2079852416 countsByYear W20798524162015 @default.
• W2079852416 countsByYear W20798524162021 @default.
• W2079852416 crossrefType "journal-article" @default.
• W2079852416 hasAuthorship W2079852416A5014113718 @default.
• W2079852416 hasAuthorship W2079852416A5077858175 @default.
• W2079852416 hasAuthorship W2079852416A5083478106 @default.
• W2079852416 hasAuthorship W2079852416A5086552836 @default.
• W2079852416 hasConcept C111368507 @default.
• W2079852416 hasConcept C113196181 @default.
• W2079852416 hasConcept C127313418 @default.
• W2079852416 hasConcept C127413603 @default.
• W2079852416 hasConcept C159985019 @default.
• W2079852416 hasConcept C171250308 @default.
• W2079852416 hasConcept C175708663 @default.
• W2079852416 hasConcept C178790620 @default.
• W2079852416 hasConcept C179104552 @default.
• W2079852416 hasConcept C185592680 @default.
• W2079852416 hasConcept C191897082 @default.
• W2079852416 hasConcept C191952053 @default.
• W2079852416 hasConcept C192562407 @default.
• W2079852416 hasConcept C2776390347 @default.
• W2079852416 hasConcept C2777289219 @default.
• W2079852416 hasConcept C2778024649 @default.
• W2079852416 hasConcept C2779667780 @default.
• W2079852416 hasConcept C2780814088 @default.
• W2079852416 hasConcept C42360764 @default.
• W2079852416 hasConcept C49040817 @default.
• W2079852416 hasConcept C501308230 @default.
• W2079852416 hasConcept C544956773 @default.
• W2079852416 hasConcept C56052488 @default.
• W2079852416 hasConcept C57410435 @default.
• W2079852416 hasConcept C57863236 @default.
• W2079852416 hasConceptScore W2079852416C111368507 @default.
• W2079852416 hasConceptScore W2079852416C113196181 @default.
• W2079852416 hasConceptScore W2079852416C127313418 @default.
• W2079852416 hasConceptScore W2079852416C127413603 @default.
• W2079852416 hasConceptScore W2079852416C159985019 @default.
• W2079852416 hasConceptScore W2079852416C171250308 @default.
• W2079852416 hasConceptScore W2079852416C175708663 @default.
• W2079852416 hasConceptScore W2079852416C178790620 @default.
• W2079852416 hasConceptScore W2079852416C179104552 @default.
• W2079852416 hasConceptScore W2079852416C185592680 @default.
• W2079852416 hasConceptScore W2079852416C191897082 @default.
• W2079852416 hasConceptScore W2079852416C191952053 @default.
• W2079852416 hasConceptScore W2079852416C192562407 @default.
• W2079852416 hasConceptScore W2079852416C2776390347 @default.
• W2079852416 hasConceptScore W2079852416C2777289219 @default.
• W2079852416 hasConceptScore W2079852416C2778024649 @default.
• W2079852416 hasConceptScore W2079852416C2779667780 @default.
• W2079852416 hasConceptScore W2079852416C2780814088 @default.
• W2079852416 hasConceptScore W2079852416C42360764 @default.
• W2079852416 hasConceptScore W2079852416C49040817 @default.
• W2079852416 hasConceptScore W2079852416C501308230 @default.
• W2079852416 hasConceptScore W2079852416C544956773 @default.
• W2079852416 hasConceptScore W2079852416C56052488 @default.
• W2079852416 hasConceptScore W2079852416C57410435 @default.
• W2079852416 hasConceptScore W2079852416C57863236 @default.
• W2079852416 hasIssue "2" @default.
• W2079852416 hasLocation W20798524161 @default.
• W2079852416 hasOpenAccess W2079852416 @default.
• W2079852416 hasPrimaryLocation W20798524161 @default.
• W2079852416 hasRelatedWork W1597299932 @default.
• W2079852416 hasRelatedWork W1644280946 @default.
• W2079852416 hasRelatedWork W1990578119 @default.
• W2079852416 hasRelatedWork W1990859522 @default.
• W2079852416 hasRelatedWork W1995587412 @default.
• W2079852416 hasRelatedWork W2026600810 @default.

• next