Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079864552> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2079864552 endingPage "3901" @default.
- W2079864552 startingPage "3895" @default.
- W2079864552 abstract "Thin films of silicon-containing polymers were studied to investigate changes in surface composition and morphology on exposure to an oxygen plasma. For low molecular weight poly(pentamethyldisilylstyrene) (P(PMDSS)), a reticulated structure was observed by atomic force microscopy (AFM) that could limit future lithographic applications of these materials. The reticulations were of approximately 1 μm in width and 5 μm in length, though a higher molecular weight polymer resulted in smaller feature sizes. In polysilane polymers containing silicon in the backbone and molecular weights significantly larger than the entanglement molecular weight, the feature dimensions were even smaller. Films etched at lower temperature (0 °C) displayed none of the reticulated morphology, retaining instead the smooth appearance of pre-etched films. It was found by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) that a thin (<100 A) layer of SiOx formed on the surface of all of the studied silicon-c..." @default.
- W2079864552 created "2016-06-24" @default.
- W2079864552 creator A5005954590 @default.
- W2079864552 creator A5040518494 @default.
- W2079864552 creator A5045478071 @default.
- W2079864552 creator A5045479059 @default.
- W2079864552 creator A5052044048 @default.
- W2079864552 creator A5064340656 @default.
- W2079864552 creator A5070808098 @default.
- W2079864552 creator A5080636420 @default.
- W2079864552 creator A5086730878 @default.
- W2079864552 date "1998-11-13" @default.
- W2079864552 modified "2023-09-22" @default.
- W2079864552 title "Curious Morphology of Silicon-Containing Polymer Films on Exposure to Oxygen Plasma" @default.
- W2079864552 cites W1976817702 @default.
- W2079864552 cites W1986968141 @default.
- W2079864552 cites W1993548322 @default.
- W2079864552 cites W2010659317 @default.
- W2079864552 cites W2019364943 @default.
- W2079864552 cites W2023690704 @default.
- W2079864552 cites W2032810988 @default.
- W2079864552 cites W2053459321 @default.
- W2079864552 cites W2072375896 @default.
- W2079864552 cites W2074165933 @default.
- W2079864552 cites W2091224001 @default.
- W2079864552 cites W2094340051 @default.
- W2079864552 cites W2487326684 @default.
- W2079864552 doi "https://doi.org/10.1021/cm980314+" @default.
- W2079864552 hasPublicationYear "1998" @default.
- W2079864552 type Work @default.
- W2079864552 sameAs 2079864552 @default.
- W2079864552 citedByCount "23" @default.
- W2079864552 countsByYear W20798645522012 @default.
- W2079864552 countsByYear W20798645522013 @default.
- W2079864552 countsByYear W20798645522014 @default.
- W2079864552 countsByYear W20798645522015 @default.
- W2079864552 countsByYear W20798645522020 @default.
- W2079864552 crossrefType "journal-article" @default.
- W2079864552 hasAuthorship W2079864552A5005954590 @default.
- W2079864552 hasAuthorship W2079864552A5040518494 @default.
- W2079864552 hasAuthorship W2079864552A5045478071 @default.
- W2079864552 hasAuthorship W2079864552A5045479059 @default.
- W2079864552 hasAuthorship W2079864552A5052044048 @default.
- W2079864552 hasAuthorship W2079864552A5064340656 @default.
- W2079864552 hasAuthorship W2079864552A5070808098 @default.
- W2079864552 hasAuthorship W2079864552A5080636420 @default.
- W2079864552 hasAuthorship W2079864552A5086730878 @default.
- W2079864552 hasConcept C121332964 @default.
- W2079864552 hasConcept C127413603 @default.
- W2079864552 hasConcept C159985019 @default.
- W2079864552 hasConcept C178790620 @default.
- W2079864552 hasConcept C185592680 @default.
- W2079864552 hasConcept C192562407 @default.
- W2079864552 hasConcept C42360764 @default.
- W2079864552 hasConcept C49040817 @default.
- W2079864552 hasConcept C499950583 @default.
- W2079864552 hasConcept C521977710 @default.
- W2079864552 hasConcept C540031477 @default.
- W2079864552 hasConcept C54355233 @default.
- W2079864552 hasConcept C544956773 @default.
- W2079864552 hasConcept C62520636 @default.
- W2079864552 hasConcept C82706917 @default.
- W2079864552 hasConcept C86803240 @default.
- W2079864552 hasConceptScore W2079864552C121332964 @default.
- W2079864552 hasConceptScore W2079864552C127413603 @default.
- W2079864552 hasConceptScore W2079864552C159985019 @default.
- W2079864552 hasConceptScore W2079864552C178790620 @default.
- W2079864552 hasConceptScore W2079864552C185592680 @default.
- W2079864552 hasConceptScore W2079864552C192562407 @default.
- W2079864552 hasConceptScore W2079864552C42360764 @default.
- W2079864552 hasConceptScore W2079864552C49040817 @default.
- W2079864552 hasConceptScore W2079864552C499950583 @default.
- W2079864552 hasConceptScore W2079864552C521977710 @default.
- W2079864552 hasConceptScore W2079864552C540031477 @default.
- W2079864552 hasConceptScore W2079864552C54355233 @default.
- W2079864552 hasConceptScore W2079864552C544956773 @default.
- W2079864552 hasConceptScore W2079864552C62520636 @default.
- W2079864552 hasConceptScore W2079864552C82706917 @default.
- W2079864552 hasConceptScore W2079864552C86803240 @default.
- W2079864552 hasIssue "12" @default.
- W2079864552 hasLocation W20798645521 @default.
- W2079864552 hasOpenAccess W2079864552 @default.
- W2079864552 hasPrimaryLocation W20798645521 @default.
- W2079864552 hasRelatedWork W1935225110 @default.
- W2079864552 hasRelatedWork W1973395931 @default.
- W2079864552 hasRelatedWork W2087998702 @default.
- W2079864552 hasRelatedWork W2129795668 @default.
- W2079864552 hasRelatedWork W2312552982 @default.
- W2079864552 hasRelatedWork W2315450269 @default.
- W2079864552 hasRelatedWork W2596785910 @default.
- W2079864552 hasRelatedWork W3036157976 @default.
- W2079864552 hasRelatedWork W4323657966 @default.
- W2079864552 hasRelatedWork W846098613 @default.
- W2079864552 hasVolume "10" @default.
- W2079864552 isParatext "false" @default.
- W2079864552 isRetracted "false" @default.
- W2079864552 magId "2079864552" @default.
- W2079864552 workType "article" @default.