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- W2079876914 abstract "ABSTRACTThe inverse problem ofdetermination of the optical parameters ofthin polymer film on the monoczystalline silicon wafer when experimental transmission spectra are used, is solved for the special case of low absorption. Solution iscarried out with allowance for the light interference in the film and multiple reflections of light in the wafer. Our results show that dependence of absorption bands intensity on the film thickness is nonmonotonous, i. e. interferencehas an influence on the optical density ofabsorption bands in registered spectrum.1 . INTRODUCTION Quantitative spectral analysis of thin polymer film of photoresist in JR range enables to study the kinetics of formation oflatent image, which is characterized by the change of absorption bands of initial and irradiated materials.To cariy out such investigations exact measurement ofIR absoiption in film is necessary. The influence of light interference in the thin film on a5sorption bands intensity usually is connected withsuperposition of two independent phenomena: interference and absorption. Such interpretation leads to conclusion:" @default.
- W2079876914 created "2016-06-24" @default.
- W2079876914 creator A5055187235 @default.
- W2079876914 date "1995-06-23" @default.
- W2079876914 modified "2023-09-23" @default.
- W2079876914 title "<title>Measurement of refraction and absorption indices of thin polymer film on the transparent semiconductor substrate via FTIR spectrometry</title>" @default.
- W2079876914 doi "https://doi.org/10.1117/12.213187" @default.
- W2079876914 hasPublicationYear "1995" @default.
- W2079876914 type Work @default.
- W2079876914 sameAs 2079876914 @default.
- W2079876914 citedByCount "0" @default.
- W2079876914 crossrefType "proceedings-article" @default.
- W2079876914 hasAuthorship W2079876914A5055187235 @default.
- W2079876914 hasConcept C111368507 @default.
- W2079876914 hasConcept C113196181 @default.
- W2079876914 hasConcept C120665830 @default.
- W2079876914 hasConcept C121332964 @default.
- W2079876914 hasConcept C125287762 @default.
- W2079876914 hasConcept C127313418 @default.
- W2079876914 hasConcept C134406635 @default.
- W2079876914 hasConcept C159985019 @default.
- W2079876914 hasConcept C160671074 @default.
- W2079876914 hasConcept C171250308 @default.
- W2079876914 hasConcept C185592680 @default.
- W2079876914 hasConcept C19067145 @default.
- W2079876914 hasConcept C192562407 @default.
- W2079876914 hasConcept C2777289219 @default.
- W2079876914 hasConcept C2779227376 @default.
- W2079876914 hasConcept C43617362 @default.
- W2079876914 hasConcept C49040817 @default.
- W2079876914 hasConceptScore W2079876914C111368507 @default.
- W2079876914 hasConceptScore W2079876914C113196181 @default.
- W2079876914 hasConceptScore W2079876914C120665830 @default.
- W2079876914 hasConceptScore W2079876914C121332964 @default.
- W2079876914 hasConceptScore W2079876914C125287762 @default.
- W2079876914 hasConceptScore W2079876914C127313418 @default.
- W2079876914 hasConceptScore W2079876914C134406635 @default.
- W2079876914 hasConceptScore W2079876914C159985019 @default.
- W2079876914 hasConceptScore W2079876914C160671074 @default.
- W2079876914 hasConceptScore W2079876914C171250308 @default.
- W2079876914 hasConceptScore W2079876914C185592680 @default.
- W2079876914 hasConceptScore W2079876914C19067145 @default.
- W2079876914 hasConceptScore W2079876914C192562407 @default.
- W2079876914 hasConceptScore W2079876914C2777289219 @default.
- W2079876914 hasConceptScore W2079876914C2779227376 @default.
- W2079876914 hasConceptScore W2079876914C43617362 @default.
- W2079876914 hasConceptScore W2079876914C49040817 @default.
- W2079876914 hasLocation W20798769141 @default.
- W2079876914 hasOpenAccess W2079876914 @default.
- W2079876914 hasPrimaryLocation W20798769141 @default.
- W2079876914 hasRelatedWork W1966475593 @default.
- W2079876914 hasRelatedWork W1980731223 @default.
- W2079876914 hasRelatedWork W1981241847 @default.
- W2079876914 hasRelatedWork W1986125643 @default.
- W2079876914 hasRelatedWork W2006531289 @default.
- W2079876914 hasRelatedWork W2013463127 @default.
- W2079876914 hasRelatedWork W2024791134 @default.
- W2079876914 hasRelatedWork W2041197115 @default.
- W2079876914 hasRelatedWork W2057372890 @default.
- W2079876914 hasRelatedWork W2067338387 @default.
- W2079876914 hasRelatedWork W2087137030 @default.
- W2079876914 hasRelatedWork W2088712642 @default.
- W2079876914 hasRelatedWork W2089998749 @default.
- W2079876914 hasRelatedWork W2097763367 @default.
- W2079876914 hasRelatedWork W2140325623 @default.
- W2079876914 hasRelatedWork W2154977448 @default.
- W2079876914 hasRelatedWork W2171656088 @default.
- W2079876914 hasRelatedWork W2273786534 @default.
- W2079876914 hasRelatedWork W2833444014 @default.
- W2079876914 hasRelatedWork W2874859382 @default.
- W2079876914 isParatext "false" @default.
- W2079876914 isRetracted "false" @default.
- W2079876914 magId "2079876914" @default.
- W2079876914 workType "article" @default.