FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079894275> ?p ?o ?g. }

• W2079894275 endingPage "63" @default.
• W2079894275 startingPage "59" @default.
• W2079894275 abstract "In this paper, we investigate the growth rate and strain relaxation of Si1−xGex layers grown on Si substrates by UHV-CVD. The Si1−xGex growth rate is found to exhibit two different behaviors as a function of growth temperature. Above the temperature corresponding to hydrogen desorption (TH), the SiGe growth rate first decreases with x, and finally becomes almost independent of x at higher values of x. Below TH, the SiGe growth rate first increases with x, then shows a maximum and finally becomes almost independent of x at higher values of x. Using in-situ reflection high-energy electron diffraction (RHEED), transmission electron microscopy and photoluminescence, we have clearly identified two distinct mechanisms for strain relaxation as a function of Ge content: at x=0.15 strain is relaxed by nucleation of misfit dislocations while the film surface remains smooth throughout growth and relaxation process. The introduction of dislocations is found to occur before lattice relaxation. At x=0.22, strain is first relaxed via formation of coherent islands before reaching the equilibrium critical thickness for dislocation nucleation. We also show that in-situ RHEED is a powerful technique to probe the evolution of film morphology in an ultra high vacuum chemical vapour deposition system. © 1997 Elsevier Science S.A. All rights reserved." @default.
• W2079894275 created "2016-06-24" @default.
• W2079894275 creator A5017116940 @default.
• W2079894275 creator A5042491313 @default.
• W2079894275 creator A5051153219 @default.
• W2079894275 creator A5056868659 @default.
• W2079894275 creator A5057698313 @default.
• W2079894275 creator A5060467389 @default.
• W2079894275 date "1997-02-01" @default.
• W2079894275 modified "2023-10-18" @default.
• W2079894275 title "UHV-CVD heteroepitaxial growth of Si1−xGex alloys on Si(100) using silane and germane" @default.
• W2079894275 cites W1965931303 @default.
• W2079894275 cites W1969103796 @default.
• W2079894275 cites W1973735419 @default.
• W2079894275 cites W1977451748 @default.
• W2079894275 cites W1983202720 @default.
• W2079894275 cites W2004124513 @default.
• W2079894275 cites W2006470848 @default.
• W2079894275 cites W2019989182 @default.
• W2079894275 cites W2020367618 @default.
• W2079894275 cites W2039300797 @default.
• W2079894275 cites W2046100210 @default.
• W2079894275 cites W2054088302 @default.
• W2079894275 cites W2059813681 @default.
• W2079894275 cites W2063140846 @default.
• W2079894275 cites W2076219320 @default.
• W2079894275 cites W2079463436 @default.
• W2079894275 cites W2081087367 @default.
• W2079894275 cites W2083354023 @default.
• W2079894275 cites W2083972074 @default.
• W2079894275 cites W2536229940 @default.
• W2079894275 doi "https://doi.org/10.1016/s0040-6090(96)09331-5" @default.
• W2079894275 hasPublicationYear "1997" @default.
• W2079894275 type Work @default.
• W2079894275 sameAs 2079894275 @default.
• W2079894275 citedByCount "20" @default.
• W2079894275 countsByYear W20798942752013 @default.
• W2079894275 countsByYear W20798942752014 @default.
• W2079894275 countsByYear W20798942752015 @default.
• W2079894275 countsByYear W20798942752017 @default.
• W2079894275 countsByYear W20798942752018 @default.
• W2079894275 crossrefType "journal-article" @default.
• W2079894275 hasAuthorship W2079894275A5017116940 @default.
• W2079894275 hasAuthorship W2079894275A5042491313 @default.
• W2079894275 hasAuthorship W2079894275A5051153219 @default.
• W2079894275 hasAuthorship W2079894275A5056868659 @default.
• W2079894275 hasAuthorship W2079894275A5057698313 @default.
• W2079894275 hasAuthorship W2079894275A5060467389 @default.
• W2079894275 hasConcept C120665830 @default.
• W2079894275 hasConcept C121332964 @default.
• W2079894275 hasConcept C146088050 @default.
• W2079894275 hasConcept C149912024 @default.
• W2079894275 hasConcept C15744967 @default.
• W2079894275 hasConcept C159122135 @default.
• W2079894275 hasConcept C159985019 @default.
• W2079894275 hasConcept C171250308 @default.
• W2079894275 hasConcept C178790620 @default.
• W2079894275 hasConcept C185592680 @default.
• W2079894275 hasConcept C192562407 @default.
• W2079894275 hasConcept C200096950 @default.
• W2079894275 hasConcept C202974441 @default.
• W2079894275 hasConcept C207114421 @default.
• W2079894275 hasConcept C26873012 @default.
• W2079894275 hasConcept C2776029896 @default.
• W2079894275 hasConcept C2776154250 @default.
• W2079894275 hasConcept C49040817 @default.
• W2079894275 hasConcept C544956773 @default.
• W2079894275 hasConcept C550623735 @default.
• W2079894275 hasConcept C57410435 @default.
• W2079894275 hasConcept C61048295 @default.
• W2079894275 hasConcept C77557913 @default.
• W2079894275 hasConcept C77805123 @default.
• W2079894275 hasConcept C79794668 @default.
• W2079894275 hasConcept C8010536 @default.
• W2079894275 hasConceptScore W2079894275C120665830 @default.
• W2079894275 hasConceptScore W2079894275C121332964 @default.
• W2079894275 hasConceptScore W2079894275C146088050 @default.
• W2079894275 hasConceptScore W2079894275C149912024 @default.
• W2079894275 hasConceptScore W2079894275C15744967 @default.
• W2079894275 hasConceptScore W2079894275C159122135 @default.
• W2079894275 hasConceptScore W2079894275C159985019 @default.
• W2079894275 hasConceptScore W2079894275C171250308 @default.
• W2079894275 hasConceptScore W2079894275C178790620 @default.
• W2079894275 hasConceptScore W2079894275C185592680 @default.
• W2079894275 hasConceptScore W2079894275C192562407 @default.
• W2079894275 hasConceptScore W2079894275C200096950 @default.
• W2079894275 hasConceptScore W2079894275C202974441 @default.
• W2079894275 hasConceptScore W2079894275C207114421 @default.
• W2079894275 hasConceptScore W2079894275C26873012 @default.
• W2079894275 hasConceptScore W2079894275C2776029896 @default.
• W2079894275 hasConceptScore W2079894275C2776154250 @default.
• W2079894275 hasConceptScore W2079894275C49040817 @default.
• W2079894275 hasConceptScore W2079894275C544956773 @default.
• W2079894275 hasConceptScore W2079894275C550623735 @default.
• W2079894275 hasConceptScore W2079894275C57410435 @default.
• W2079894275 hasConceptScore W2079894275C61048295 @default.
• W2079894275 hasConceptScore W2079894275C77557913 @default.
• W2079894275 hasConceptScore W2079894275C77805123 @default.

• next