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- W2079896132 abstract "A highly flexible, modular design and production framework for microelectromechanical systems, suitable for mid-scale production at reasonable costs, is presented. The modulator framework, similar to unit construction system well-known in the macro world, consists of a manufacturer set and an application kit. It allows for considerable reduction of design and production expenditure while retaining maximum technical flexibility. The feasibility of the modular approach is demonstrated by the presentation and discussion of a novel modular vertical integration technique.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2079896132 date "1998-01-02" @default.
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- W2079896132 title "<title>Modularized microelectromechanical devices as key components for advanced intelligent autonomous sensors and control systems</title>" @default.
- W2079896132 doi "https://doi.org/10.1117/12.298007" @default.
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