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- W2079929535 abstract "It has been considered that when the structure amplitude | F | for a quasi-forbidden reflection of a lattice-matched heteroepitaxial film is considerably larger than that of the substrate or the other layer, for example, for the 200 reflection of InGaP/GaAs, only the film can be observed and characterized. To show the validity of this method, the respective layers in an InGaAs/InP/(100)GaAs structure have been characterized; the upper InGaAs layer, the inner InP layer and the GaAs substrate have been observed using the 311 A reflection with a very small glancing angle (∼0.5°), the 200 reflection of the quasi-forbidden reflection and the 400 reflection, respectively." @default.
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- W2079929535 date "1989-12-01" @default.
- W2079929535 modified "2023-09-25" @default.
- W2079929535 title "An X-Ray Diffraction Method for Characterization of Several Lattice-Matched Heteroepitaxial Films" @default.
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- W2079929535 doi "https://doi.org/10.1143/jjap.28.l2276" @default.
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