Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080147784> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2080147784 endingPage "1176" @default.
- W2080147784 startingPage "1176" @default.
- W2080147784 abstract "Al-doped ZnO films were prepared by both RF planar magnetron and RF diode sputterings. The dependence of the ZnO film resistivity on both substrate position and Ar gas pressure was investigated. Energetic oxygen atoms (O atoms) bombarding the film were also observed by time-of-flight apparatus, and the correlation between the film resistivity and the film bombardment by the energetic O atoms was examined. The following results were obtained: When the bombardment of energetic O atoms on Al-doped ZnO films became significant at the substrate positions facing the eroded area of the target, the film resistivity increased at the same positions. Then, both the carrier concentration and Hall mobility of the Al-doped ZnO films were decreased, which was thought to be due to the film bombardment by the energetic O atoms." @default.
- W2080147784 created "2016-06-24" @default.
- W2080147784 creator A5038309958 @default.
- W2080147784 creator A5052387109 @default.
- W2080147784 creator A5060211954 @default.
- W2080147784 date "1988-07-01" @default.
- W2080147784 modified "2023-10-18" @default.
- W2080147784 title "Radiation Effect due to Energetic Oxygen Atoms on Conductive Al-Doped ZnO Films" @default.
- W2080147784 cites W1977284103 @default.
- W2080147784 cites W1998134756 @default.
- W2080147784 cites W1998633364 @default.
- W2080147784 cites W2056109291 @default.
- W2080147784 cites W2061493569 @default.
- W2080147784 cites W2064165997 @default.
- W2080147784 cites W2068134346 @default.
- W2080147784 cites W2068560984 @default.
- W2080147784 cites W2081018457 @default.
- W2080147784 cites W2091141721 @default.
- W2080147784 cites W2109622617 @default.
- W2080147784 cites W2588852183 @default.
- W2080147784 doi "https://doi.org/10.1143/jjap.27.1176" @default.
- W2080147784 hasPublicationYear "1988" @default.
- W2080147784 type Work @default.
- W2080147784 sameAs 2080147784 @default.
- W2080147784 citedByCount "101" @default.
- W2080147784 countsByYear W20801477842012 @default.
- W2080147784 countsByYear W20801477842013 @default.
- W2080147784 countsByYear W20801477842014 @default.
- W2080147784 countsByYear W20801477842016 @default.
- W2080147784 countsByYear W20801477842017 @default.
- W2080147784 countsByYear W20801477842018 @default.
- W2080147784 countsByYear W20801477842019 @default.
- W2080147784 countsByYear W20801477842020 @default.
- W2080147784 countsByYear W20801477842023 @default.
- W2080147784 crossrefType "journal-article" @default.
- W2080147784 hasAuthorship W2080147784A5038309958 @default.
- W2080147784 hasAuthorship W2080147784A5052387109 @default.
- W2080147784 hasAuthorship W2080147784A5060211954 @default.
- W2080147784 hasConcept C111368507 @default.
- W2080147784 hasConcept C113196181 @default.
- W2080147784 hasConcept C119599485 @default.
- W2080147784 hasConcept C127313418 @default.
- W2080147784 hasConcept C127413603 @default.
- W2080147784 hasConcept C178790620 @default.
- W2080147784 hasConcept C185592680 @default.
- W2080147784 hasConcept C192562407 @default.
- W2080147784 hasConcept C2777289219 @default.
- W2080147784 hasConcept C43617362 @default.
- W2080147784 hasConcept C49040817 @default.
- W2080147784 hasConcept C540031477 @default.
- W2080147784 hasConcept C57863236 @default.
- W2080147784 hasConcept C69990965 @default.
- W2080147784 hasConceptScore W2080147784C111368507 @default.
- W2080147784 hasConceptScore W2080147784C113196181 @default.
- W2080147784 hasConceptScore W2080147784C119599485 @default.
- W2080147784 hasConceptScore W2080147784C127313418 @default.
- W2080147784 hasConceptScore W2080147784C127413603 @default.
- W2080147784 hasConceptScore W2080147784C178790620 @default.
- W2080147784 hasConceptScore W2080147784C185592680 @default.
- W2080147784 hasConceptScore W2080147784C192562407 @default.
- W2080147784 hasConceptScore W2080147784C2777289219 @default.
- W2080147784 hasConceptScore W2080147784C43617362 @default.
- W2080147784 hasConceptScore W2080147784C49040817 @default.
- W2080147784 hasConceptScore W2080147784C540031477 @default.
- W2080147784 hasConceptScore W2080147784C57863236 @default.
- W2080147784 hasConceptScore W2080147784C69990965 @default.
- W2080147784 hasIssue "7R" @default.
- W2080147784 hasLocation W20801477841 @default.
- W2080147784 hasOpenAccess W2080147784 @default.
- W2080147784 hasPrimaryLocation W20801477841 @default.
- W2080147784 hasRelatedWork W1996779045 @default.
- W2080147784 hasRelatedWork W2008215068 @default.
- W2080147784 hasRelatedWork W2023174690 @default.
- W2080147784 hasRelatedWork W2052710927 @default.
- W2080147784 hasRelatedWork W2081010284 @default.
- W2080147784 hasRelatedWork W2130198572 @default.
- W2080147784 hasRelatedWork W2470837056 @default.
- W2080147784 hasRelatedWork W2743194952 @default.
- W2080147784 hasRelatedWork W2774293966 @default.
- W2080147784 hasRelatedWork W3140250654 @default.
- W2080147784 hasVolume "27" @default.
- W2080147784 isParatext "false" @default.
- W2080147784 isRetracted "false" @default.
- W2080147784 magId "2080147784" @default.
- W2080147784 workType "article" @default.