Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080256212> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2080256212 abstract "CVD diamond film is an attractive potential material for microelectronics and MEMS application, but patterning of diamond is one of the main difficulties hindering diamond electronics. In this paper, we studied the RIE process for precise patterning of diamond films. Ni/Cr, Cu/Cu or NiTi films were used as maskants, oxygen as reactive gas. The etching results showed that the NiTi film has high etching selectivity when used as mask for diamond etching and its is very convenient to be patterned by the special developed chemical etchant. Using O<SUB>2</SUB> as main etching gas, the RIE can etch the diamond film effectively. The process parameters such as RF power, vacuum pressure have marked influence on the etching rate and the patterning of diamond film has been defined. Combined with sacrifice layer process and electroplating through mask technique, diamond micro hinge has been fabricated on silicon wafer." @default.
- W2080256212 created "2016-06-24" @default.
- W2080256212 creator A5009734176 @default.
- W2080256212 creator A5012278873 @default.
- W2080256212 creator A5021481144 @default.
- W2080256212 creator A5032831115 @default.
- W2080256212 creator A5059748430 @default.
- W2080256212 creator A5072098500 @default.
- W2080256212 date "2000-08-25" @default.
- W2080256212 modified "2023-09-30" @default.
- W2080256212 title "<title>Patterning of diamond films by RIE and its MEMS applications</title>" @default.
- W2080256212 doi "https://doi.org/10.1117/12.396465" @default.
- W2080256212 hasPublicationYear "2000" @default.
- W2080256212 type Work @default.
- W2080256212 sameAs 2080256212 @default.
- W2080256212 citedByCount "2" @default.
- W2080256212 countsByYear W20802562122015 @default.
- W2080256212 crossrefType "proceedings-article" @default.
- W2080256212 hasAuthorship W2080256212A5009734176 @default.
- W2080256212 hasAuthorship W2080256212A5012278873 @default.
- W2080256212 hasAuthorship W2080256212A5021481144 @default.
- W2080256212 hasAuthorship W2080256212A5032831115 @default.
- W2080256212 hasAuthorship W2080256212A5059748430 @default.
- W2080256212 hasAuthorship W2080256212A5072098500 @default.
- W2080256212 hasConcept C100460472 @default.
- W2080256212 hasConcept C1291036 @default.
- W2080256212 hasConcept C130472188 @default.
- W2080256212 hasConcept C160671074 @default.
- W2080256212 hasConcept C171250308 @default.
- W2080256212 hasConcept C187937830 @default.
- W2080256212 hasConcept C191897082 @default.
- W2080256212 hasConcept C192562407 @default.
- W2080256212 hasConcept C2776921476 @default.
- W2080256212 hasConcept C2779227376 @default.
- W2080256212 hasConcept C37977207 @default.
- W2080256212 hasConcept C49040817 @default.
- W2080256212 hasConcept C544956773 @default.
- W2080256212 hasConceptScore W2080256212C100460472 @default.
- W2080256212 hasConceptScore W2080256212C1291036 @default.
- W2080256212 hasConceptScore W2080256212C130472188 @default.
- W2080256212 hasConceptScore W2080256212C160671074 @default.
- W2080256212 hasConceptScore W2080256212C171250308 @default.
- W2080256212 hasConceptScore W2080256212C187937830 @default.
- W2080256212 hasConceptScore W2080256212C191897082 @default.
- W2080256212 hasConceptScore W2080256212C192562407 @default.
- W2080256212 hasConceptScore W2080256212C2776921476 @default.
- W2080256212 hasConceptScore W2080256212C2779227376 @default.
- W2080256212 hasConceptScore W2080256212C37977207 @default.
- W2080256212 hasConceptScore W2080256212C49040817 @default.
- W2080256212 hasConceptScore W2080256212C544956773 @default.
- W2080256212 hasLocation W20802562121 @default.
- W2080256212 hasOpenAccess W2080256212 @default.
- W2080256212 hasPrimaryLocation W20802562121 @default.
- W2080256212 hasRelatedWork W1584171941 @default.
- W2080256212 hasRelatedWork W1942645863 @default.
- W2080256212 hasRelatedWork W1974003366 @default.
- W2080256212 hasRelatedWork W1980475310 @default.
- W2080256212 hasRelatedWork W1983206552 @default.
- W2080256212 hasRelatedWork W2027983671 @default.
- W2080256212 hasRelatedWork W2109739407 @default.
- W2080256212 hasRelatedWork W2135105783 @default.
- W2080256212 hasRelatedWork W2164353131 @default.
- W2080256212 hasRelatedWork W2903101056 @default.
- W2080256212 isParatext "false" @default.
- W2080256212 isRetracted "false" @default.
- W2080256212 magId "2080256212" @default.
- W2080256212 workType "article" @default.