Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080264695> ?p ?o ?g. }
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- W2080264695 endingPage "244" @default.
- W2080264695 startingPage "C9" @default.
- W2080264695 abstract "Dans ce papier, nous presentons les possibilites de la lithographie X par proximite (XRL) pour la production de circuits imprimes a tres forte integration (ULSI). Les dernieres performances, realisees en utilisant le rayonnement synchrotron, montrent que cette technologie est prete a aborder l'echelle d'integration du Gbit. Nous decrivons egalement l'activite du laboratoire L2M/CNRS qui comprend le developpement d'une technologie pour realiser des nano-masques (< 0.1 μm) et la realisation d'experiences de nano-lithographie X sur Super-ACO. La description des resultats obtenus est une demonstration des possibilites offertes par cette technique en micro et nano-fabrication" @default.
- W2080264695 created "2016-06-24" @default.
- W2080264695 creator A5000718357 @default.
- W2080264695 creator A5005113685 @default.
- W2080264695 creator A5025688601 @default.
- W2080264695 creator A5070592185 @default.
- W2080264695 creator A5086425118 @default.
- W2080264695 date "1994-11-01" @default.
- W2080264695 modified "2023-09-25" @default.
- W2080264695 title "X-ray lithography : an overview and recent activities at super-ACO" @default.
- W2080264695 doi "https://doi.org/10.1051/jp4:1994942" @default.
- W2080264695 hasPublicationYear "1994" @default.
- W2080264695 type Work @default.
- W2080264695 sameAs 2080264695 @default.
- W2080264695 citedByCount "1" @default.
- W2080264695 countsByYear W20802646952016 @default.
- W2080264695 crossrefType "journal-article" @default.
- W2080264695 hasAuthorship W2080264695A5000718357 @default.
- W2080264695 hasAuthorship W2080264695A5005113685 @default.
- W2080264695 hasAuthorship W2080264695A5025688601 @default.
- W2080264695 hasAuthorship W2080264695A5070592185 @default.
- W2080264695 hasAuthorship W2080264695A5086425118 @default.
- W2080264695 hasBestOaLocation W20802646952 @default.
- W2080264695 hasConcept C127413603 @default.
- W2080264695 hasConcept C171250308 @default.
- W2080264695 hasConcept C192562407 @default.
- W2080264695 hasConcept C204223013 @default.
- W2080264695 hasConcept C2779227376 @default.
- W2080264695 hasConcept C41008148 @default.
- W2080264695 hasConcept C41794268 @default.
- W2080264695 hasConcept C49040817 @default.
- W2080264695 hasConcept C53524968 @default.
- W2080264695 hasConcept C61696701 @default.
- W2080264695 hasConceptScore W2080264695C127413603 @default.
- W2080264695 hasConceptScore W2080264695C171250308 @default.
- W2080264695 hasConceptScore W2080264695C192562407 @default.
- W2080264695 hasConceptScore W2080264695C204223013 @default.
- W2080264695 hasConceptScore W2080264695C2779227376 @default.
- W2080264695 hasConceptScore W2080264695C41008148 @default.
- W2080264695 hasConceptScore W2080264695C41794268 @default.
- W2080264695 hasConceptScore W2080264695C49040817 @default.
- W2080264695 hasConceptScore W2080264695C53524968 @default.
- W2080264695 hasConceptScore W2080264695C61696701 @default.
- W2080264695 hasIssue "C9" @default.
- W2080264695 hasLocation W20802646951 @default.
- W2080264695 hasLocation W20802646952 @default.
- W2080264695 hasLocation W20802646953 @default.
- W2080264695 hasOpenAccess W2080264695 @default.
- W2080264695 hasPrimaryLocation W20802646951 @default.
- W2080264695 hasRelatedWork W1522179404 @default.
- W2080264695 hasRelatedWork W1993698036 @default.
- W2080264695 hasRelatedWork W2039969115 @default.
- W2080264695 hasRelatedWork W2055565127 @default.
- W2080264695 hasRelatedWork W2157979716 @default.
- W2080264695 hasRelatedWork W2234767249 @default.
- W2080264695 hasRelatedWork W2327881584 @default.
- W2080264695 hasRelatedWork W2883461808 @default.
- W2080264695 hasRelatedWork W3118612496 @default.
- W2080264695 hasRelatedWork W573585812 @default.
- W2080264695 hasVolume "04" @default.
- W2080264695 isParatext "false" @default.
- W2080264695 isRetracted "false" @default.
- W2080264695 magId "2080264695" @default.
- W2080264695 workType "article" @default.