Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080291378> ?p ?o ?g. }
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- W2080291378 endingPage "1596" @default.
- W2080291378 startingPage "1592" @default.
- W2080291378 abstract "The sheet resistance and junction depth as a function of time at various temperatures have been obtained for the deposition of boron in silicon by using a liquid source. A simulation program incorporating a more realistic moving boundary condition is developed to analyze the deposition process under oxidizing atmosphere. By fitting numerical solutions to experimental data, the moving interface velocity and diffusion coefficient are determined. The profile of deposited layers as a function of doping gas composition can be modeled by the change of silicon self‐interstitial concentration. The solid solubility of boron in silicon as a function of temperature has been determined Different surface concentrations corresponding to different thicknesses of the boron‐rich layer can be explained by the translation of the BRL‐Si interface." @default.
- W2080291378 created "2016-06-24" @default.
- W2080291378 creator A5087632792 @default.
- W2080291378 creator A5038620563 @default.
- W2080291378 date "1982-07-01" @default.
- W2080291378 modified "2023-09-25" @default.
- W2080291378 title "A Model for Boron Deposition in Silicon Using a BBr3 Source" @default.
- W2080291378 cites W2046819193 @default.
- W2080291378 doi "https://doi.org/10.1149/1.2124214" @default.
- W2080291378 hasPublicationYear "1982" @default.
- W2080291378 type Work @default.
- W2080291378 sameAs 2080291378 @default.
- W2080291378 citedByCount "7" @default.
- W2080291378 countsByYear W20802913782013 @default.
- W2080291378 countsByYear W20802913782021 @default.
- W2080291378 crossrefType "journal-article" @default.
- W2080291378 hasAuthorship W2080291378A5038620563 @default.
- W2080291378 hasAuthorship W2080291378A5087632792 @default.
- W2080291378 hasBestOaLocation W20802913781 @default.
- W2080291378 hasConcept C107872376 @default.
- W2080291378 hasConcept C113196181 @default.
- W2080291378 hasConcept C121332964 @default.
- W2080291378 hasConcept C151730666 @default.
- W2080291378 hasConcept C159985019 @default.
- W2080291378 hasConcept C178790620 @default.
- W2080291378 hasConcept C185592680 @default.
- W2080291378 hasConcept C191897082 @default.
- W2080291378 hasConcept C192562407 @default.
- W2080291378 hasConcept C2779227376 @default.
- W2080291378 hasConcept C2816523 @default.
- W2080291378 hasConcept C49040817 @default.
- W2080291378 hasConcept C501308230 @default.
- W2080291378 hasConcept C544956773 @default.
- W2080291378 hasConcept C57863236 @default.
- W2080291378 hasConcept C64297162 @default.
- W2080291378 hasConcept C65440619 @default.
- W2080291378 hasConcept C66825105 @default.
- W2080291378 hasConcept C69357855 @default.
- W2080291378 hasConcept C77176794 @default.
- W2080291378 hasConcept C86803240 @default.
- W2080291378 hasConcept C97355855 @default.
- W2080291378 hasConceptScore W2080291378C107872376 @default.
- W2080291378 hasConceptScore W2080291378C113196181 @default.
- W2080291378 hasConceptScore W2080291378C121332964 @default.
- W2080291378 hasConceptScore W2080291378C151730666 @default.
- W2080291378 hasConceptScore W2080291378C159985019 @default.
- W2080291378 hasConceptScore W2080291378C178790620 @default.
- W2080291378 hasConceptScore W2080291378C185592680 @default.
- W2080291378 hasConceptScore W2080291378C191897082 @default.
- W2080291378 hasConceptScore W2080291378C192562407 @default.
- W2080291378 hasConceptScore W2080291378C2779227376 @default.
- W2080291378 hasConceptScore W2080291378C2816523 @default.
- W2080291378 hasConceptScore W2080291378C49040817 @default.
- W2080291378 hasConceptScore W2080291378C501308230 @default.
- W2080291378 hasConceptScore W2080291378C544956773 @default.
- W2080291378 hasConceptScore W2080291378C57863236 @default.
- W2080291378 hasConceptScore W2080291378C64297162 @default.
- W2080291378 hasConceptScore W2080291378C65440619 @default.
- W2080291378 hasConceptScore W2080291378C66825105 @default.
- W2080291378 hasConceptScore W2080291378C69357855 @default.
- W2080291378 hasConceptScore W2080291378C77176794 @default.
- W2080291378 hasConceptScore W2080291378C86803240 @default.
- W2080291378 hasConceptScore W2080291378C97355855 @default.
- W2080291378 hasIssue "7" @default.
- W2080291378 hasLocation W20802913781 @default.
- W2080291378 hasOpenAccess W2080291378 @default.
- W2080291378 hasPrimaryLocation W20802913781 @default.
- W2080291378 hasRelatedWork W1967001754 @default.
- W2080291378 hasRelatedWork W1969216960 @default.
- W2080291378 hasRelatedWork W1978189183 @default.
- W2080291378 hasRelatedWork W2001541608 @default.
- W2080291378 hasRelatedWork W2002869223 @default.
- W2080291378 hasRelatedWork W2029782489 @default.
- W2080291378 hasRelatedWork W2033669323 @default.
- W2080291378 hasRelatedWork W2034274768 @default.
- W2080291378 hasRelatedWork W2353270493 @default.
- W2080291378 hasRelatedWork W2743194952 @default.
- W2080291378 hasVolume "129" @default.
- W2080291378 isParatext "false" @default.
- W2080291378 isRetracted "false" @default.
- W2080291378 magId "2080291378" @default.
- W2080291378 workType "article" @default.