Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080335211> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2080335211 endingPage "F45" @default.
- W2080335211 startingPage "F45" @default.
- W2080335211 abstract "Atomic layer chemical vapor deposition (ALCVD) of hafnium silicate films using a precursor combination of tetrakis (diethylamido) hafnium, , and tetra--butyl orthosilicate, was studied for high-dielectric gate oxides. The ALCVD temperature window in our study was 290-350°C with a growth rate of 1.1 Å/cycle. We investigated the effect of deposition conditions, such as deposition temperature, pulse time of precursor, and purge injection, on the film growth. The saturated composition of the Hf/ ratio was 0.37, and the impurity concentrations were less than 1 atom %. The dielectric constant of the as-deposited hafnium silicate film increased upon annealing at 600°C, but decreased for annealing above 800°C. Hysteresis in the capacitance-voltage measurements was less than 0.3 V before and after annealing. The leakage current density of the as-deposited, 600°C, and 800°C annealed films was , , and , respectively, at a bias of −1 V." @default.
- W2080335211 created "2016-06-24" @default.
- W2080335211 creator A5031754381 @default.
- W2080335211 creator A5043206362 @default.
- W2080335211 date "2005-01-01" @default.
- W2080335211 modified "2023-09-25" @default.
- W2080335211 title "Atomic Layer Chemical Vapor Deposition and Electrical Characterization of Hafnium Silicate Films" @default.
- W2080335211 cites W1509066588 @default.
- W2080335211 cites W1965368032 @default.
- W2080335211 cites W1970200102 @default.
- W2080335211 cites W1971358160 @default.
- W2080335211 cites W1981371883 @default.
- W2080335211 cites W1991965248 @default.
- W2080335211 cites W1992568289 @default.
- W2080335211 cites W1998719028 @default.
- W2080335211 cites W2011141696 @default.
- W2080335211 cites W2017392278 @default.
- W2080335211 cites W2018359939 @default.
- W2080335211 cites W2018819617 @default.
- W2080335211 cites W2021984882 @default.
- W2080335211 cites W2034324012 @default.
- W2080335211 cites W2037587145 @default.
- W2080335211 cites W2039564728 @default.
- W2080335211 cites W2041246757 @default.
- W2080335211 cites W2054535041 @default.
- W2080335211 cites W2074669726 @default.
- W2080335211 cites W2081219388 @default.
- W2080335211 cites W2337258836 @default.
- W2080335211 cites W2949902794 @default.
- W2080335211 cites W4234167646 @default.
- W2080335211 cites W2039050998 @default.
- W2080335211 doi "https://doi.org/10.1149/1.1869977" @default.
- W2080335211 hasPublicationYear "2005" @default.
- W2080335211 type Work @default.
- W2080335211 sameAs 2080335211 @default.
- W2080335211 citedByCount "14" @default.
- W2080335211 countsByYear W20803352112012 @default.
- W2080335211 countsByYear W20803352112013 @default.
- W2080335211 countsByYear W20803352112016 @default.
- W2080335211 countsByYear W20803352112018 @default.
- W2080335211 crossrefType "journal-article" @default.
- W2080335211 hasAuthorship W2080335211A5031754381 @default.
- W2080335211 hasAuthorship W2080335211A5043206362 @default.
- W2080335211 hasBestOaLocation W20803352112 @default.
- W2080335211 hasConcept C113196181 @default.
- W2080335211 hasConcept C127413603 @default.
- W2080335211 hasConcept C133386390 @default.
- W2080335211 hasConcept C171250308 @default.
- W2080335211 hasConcept C185592680 @default.
- W2080335211 hasConcept C19067145 @default.
- W2080335211 hasConcept C191897082 @default.
- W2080335211 hasConcept C192562407 @default.
- W2080335211 hasConcept C2777335606 @default.
- W2080335211 hasConcept C2777855556 @default.
- W2080335211 hasConcept C42360764 @default.
- W2080335211 hasConcept C43617362 @default.
- W2080335211 hasConcept C49040817 @default.
- W2080335211 hasConcept C534791751 @default.
- W2080335211 hasConcept C546638069 @default.
- W2080335211 hasConcept C57410435 @default.
- W2080335211 hasConcept C69544855 @default.
- W2080335211 hasConceptScore W2080335211C113196181 @default.
- W2080335211 hasConceptScore W2080335211C127413603 @default.
- W2080335211 hasConceptScore W2080335211C133386390 @default.
- W2080335211 hasConceptScore W2080335211C171250308 @default.
- W2080335211 hasConceptScore W2080335211C185592680 @default.
- W2080335211 hasConceptScore W2080335211C19067145 @default.
- W2080335211 hasConceptScore W2080335211C191897082 @default.
- W2080335211 hasConceptScore W2080335211C192562407 @default.
- W2080335211 hasConceptScore W2080335211C2777335606 @default.
- W2080335211 hasConceptScore W2080335211C2777855556 @default.
- W2080335211 hasConceptScore W2080335211C42360764 @default.
- W2080335211 hasConceptScore W2080335211C43617362 @default.
- W2080335211 hasConceptScore W2080335211C49040817 @default.
- W2080335211 hasConceptScore W2080335211C534791751 @default.
- W2080335211 hasConceptScore W2080335211C546638069 @default.
- W2080335211 hasConceptScore W2080335211C57410435 @default.
- W2080335211 hasConceptScore W2080335211C69544855 @default.
- W2080335211 hasIssue "4" @default.
- W2080335211 hasLocation W20803352111 @default.
- W2080335211 hasLocation W20803352112 @default.
- W2080335211 hasOpenAccess W2080335211 @default.
- W2080335211 hasPrimaryLocation W20803352111 @default.
- W2080335211 hasRelatedWork W1977741730 @default.
- W2080335211 hasRelatedWork W1992260176 @default.
- W2080335211 hasRelatedWork W2017362596 @default.
- W2080335211 hasRelatedWork W2021232443 @default.
- W2080335211 hasRelatedWork W2092320726 @default.
- W2080335211 hasRelatedWork W2107741794 @default.
- W2080335211 hasRelatedWork W2274328407 @default.
- W2080335211 hasRelatedWork W2755501271 @default.
- W2080335211 hasRelatedWork W2998053548 @default.
- W2080335211 hasRelatedWork W2509336900 @default.
- W2080335211 hasVolume "152" @default.
- W2080335211 isParatext "false" @default.
- W2080335211 isRetracted "false" @default.
- W2080335211 magId "2080335211" @default.
- W2080335211 workType "article" @default.