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• W2080344098 startingPage "05EE01" @default.
• W2080344098 abstract "An elongated inductively coupled plasma (ICP) torch that enables instantaneous thermal processing over a large area has been newly developed. Its circular chamber configuration enabled the generation of elongated thermal plasma. A racetrack chamber with a groove showed improvement of plasma stability. The surface temperature distribution over a substrate was measured using a simplified perpendicular-racetrack-type torch with a length of 130 mm; the surface of a glass substrate was heated to 798 K at a scanning speed of 50 mm/s and the peak temperature variation over a substrate along the longitudinal line was within ±5.5 K in the best case. A sputtered amorphous silicon thin film was successfully crystallized." @default.
• W2080344098 created "2016-06-24" @default.
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• W2080344098 date "2013-05-01" @default.
• W2080344098 modified "2023-09-27" @default.
• W2080344098 title "Elongated Inductively Coupled Thermal Plasma Torch Operable at Atmospheric Pressure" @default.
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• W2080344098 doi "https://doi.org/10.7567/jjap.52.05ee01" @default.
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