FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080397534> ?p ?o ?g. }

• W2080397534 abstract "Pulsed DC magnetron sputtered aluminum nitride (AlN) thin films are prepared on several seed layers and at different sputtering conditions. The piezoelectric c-axis (002) orientation of the AlN is analyzed with X-ray diffraction method. The transverse piezoelectric coefficient d31 is determined with a Laser-Doppler-Vibrometer at cantilevers and membranes by analytical calculations and finite element method. Additionally, thin film AlN on bulk silicon is used to characterize the longitudinal piezoelectric charge coefficient d33." @default.
• W2080397534 created "2016-06-24" @default.
• W2080397534 creator A5027719517 @default.
• W2080397534 creator A5034451174 @default.
• W2080397534 creator A5056137629 @default.
• W2080397534 creator A5060204434 @default.
• W2080397534 creator A5078817743 @default.
• W2080397534 creator A5081737452 @default.
• W2080397534 date "2014-07-16" @default.
• W2080397534 modified "2023-10-18" @default.
• W2080397534 title "Pulsed DC magnetron sputtered piezoelectric thin film aluminum nitride – Technology and piezoelectric properties" @default.
• W2080397534 cites W1965074103 @default.
• W2080397534 cites W1965840427 @default.
• W2080397534 cites W1994664391 @default.
• W2080397534 cites W2000005696 @default.
• W2080397534 cites W2005963883 @default.
• W2080397534 cites W2028991664 @default.
• W2080397534 cites W2040478557 @default.
• W2080397534 cites W2041690766 @default.
• W2080397534 cites W2050890807 @default.
• W2080397534 cites W2055357100 @default.
• W2080397534 cites W2064383723 @default.
• W2080397534 cites W2066377430 @default.
• W2080397534 cites W2067248868 @default.
• W2080397534 cites W2067425773 @default.
• W2080397534 cites W2074869505 @default.
• W2080397534 cites W2077629563 @default.
• W2080397534 cites W2079767096 @default.
• W2080397534 cites W2096917239 @default.
• W2080397534 cites W2101741204 @default.
• W2080397534 cites W2113986844 @default.
• W2080397534 cites W2118380584 @default.
• W2080397534 cites W2129091583 @default.
• W2080397534 cites W2466075813 @default.
• W2080397534 cites W4322734432 @default.
• W2080397534 cites W4367138788 @default.
• W2080397534 doi "https://doi.org/10.1063/1.4887799" @default.
• W2080397534 hasPublicationYear "2014" @default.
• W2080397534 type Work @default.
• W2080397534 sameAs 2080397534 @default.
• W2080397534 citedByCount "12" @default.
• W2080397534 countsByYear W20803975342014 @default.
• W2080397534 countsByYear W20803975342015 @default.
• W2080397534 countsByYear W20803975342018 @default.
• W2080397534 countsByYear W20803975342019 @default.
• W2080397534 countsByYear W20803975342020 @default.
• W2080397534 countsByYear W20803975342021 @default.
• W2080397534 countsByYear W20803975342022 @default.
• W2080397534 countsByYear W20803975342023 @default.
• W2080397534 crossrefType "journal-article" @default.
• W2080397534 hasAuthorship W2080397534A5027719517 @default.
• W2080397534 hasAuthorship W2080397534A5034451174 @default.
• W2080397534 hasAuthorship W2080397534A5056137629 @default.
• W2080397534 hasAuthorship W2080397534A5060204434 @default.
• W2080397534 hasAuthorship W2080397534A5078817743 @default.
• W2080397534 hasAuthorship W2080397534A5081737452 @default.
• W2080397534 hasConcept C100082104 @default.
• W2080397534 hasConcept C123408415 @default.
• W2080397534 hasConcept C135405054 @default.
• W2080397534 hasConcept C159985019 @default.
• W2080397534 hasConcept C171250308 @default.
• W2080397534 hasConcept C19067145 @default.
• W2080397534 hasConcept C192562407 @default.
• W2080397534 hasConcept C194760766 @default.
• W2080397534 hasConcept C22423302 @default.
• W2080397534 hasConcept C2779227376 @default.
• W2080397534 hasConcept C2780162792 @default.
• W2080397534 hasConcept C2781083372 @default.
• W2080397534 hasConcept C49040817 @default.
• W2080397534 hasConcept C513153333 @default.
• W2080397534 hasConcept C544956773 @default.
• W2080397534 hasConcept C61427134 @default.
• W2080397534 hasConceptScore W2080397534C100082104 @default.
• W2080397534 hasConceptScore W2080397534C123408415 @default.
• W2080397534 hasConceptScore W2080397534C135405054 @default.
• W2080397534 hasConceptScore W2080397534C159985019 @default.
• W2080397534 hasConceptScore W2080397534C171250308 @default.
• W2080397534 hasConceptScore W2080397534C19067145 @default.
• W2080397534 hasConceptScore W2080397534C192562407 @default.
• W2080397534 hasConceptScore W2080397534C194760766 @default.
• W2080397534 hasConceptScore W2080397534C22423302 @default.
• W2080397534 hasConceptScore W2080397534C2779227376 @default.
• W2080397534 hasConceptScore W2080397534C2780162792 @default.
• W2080397534 hasConceptScore W2080397534C2781083372 @default.
• W2080397534 hasConceptScore W2080397534C49040817 @default.
• W2080397534 hasConceptScore W2080397534C513153333 @default.
• W2080397534 hasConceptScore W2080397534C544956773 @default.
• W2080397534 hasConceptScore W2080397534C61427134 @default.
• W2080397534 hasIssue "3" @default.
• W2080397534 hasLocation W20803975341 @default.
• W2080397534 hasOpenAccess W2080397534 @default.
• W2080397534 hasPrimaryLocation W20803975341 @default.
• W2080397534 hasRelatedWork W1968373997 @default.
• W2080397534 hasRelatedWork W1988913114 @default.
• W2080397534 hasRelatedWork W1989928847 @default.
• W2080397534 hasRelatedWork W2086741567 @default.
• W2080397534 hasRelatedWork W2159138826 @default.
• W2080397534 hasRelatedWork W2364045966 @default.
• W2080397534 hasRelatedWork W2617606432 @default.
• W2080397534 hasRelatedWork W2890888068 @default.

• next