Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080446875> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2080446875 abstract "Pulsed-laser irradiation on a solid surface induces a highly efficient surface cleaning of submicron-sized particulates and undesirable organic overcoat films. The nanosecond-pulsed UV laser irradiation, shortly after the deposition of a thin liquid film on the surface, induces rapid vaporization of the liquid film and removal of particulates (`steam cleaning'). The laser beam also causes ablative photodecomposition of organic film contaminants on the surface (`dry cleaning'). A laser cleaning tool is constructed with an aim toward practical use based on an industrial grade KrF excimer laser. The tool includes a computer-controlled laser beam scanning system and a stable liquid film deposition unit, providing a cleaning rate of over 200 cm<SUP>2</SUP>/min. The cleaning strategy and the physical mechanisms of the laser cleaning techniques are also studied." @default.
- W2080446875 created "2016-06-24" @default.
- W2080446875 creator A5044569632 @default.
- W2080446875 creator A5058001266 @default.
- W2080446875 creator A5068103390 @default.
- W2080446875 date "1995-03-01" @default.
- W2080446875 modified "2023-09-23" @default.
- W2080446875 title "<title>Practical excimer laser-assisted cleaning of solid surfaces</title>" @default.
- W2080446875 doi "https://doi.org/10.1117/12.203633" @default.
- W2080446875 hasPublicationYear "1995" @default.
- W2080446875 type Work @default.
- W2080446875 sameAs 2080446875 @default.
- W2080446875 citedByCount "0" @default.
- W2080446875 crossrefType "proceedings-article" @default.
- W2080446875 hasAuthorship W2080446875A5044569632 @default.
- W2080446875 hasAuthorship W2080446875A5058001266 @default.
- W2080446875 hasAuthorship W2080446875A5068103390 @default.
- W2080446875 hasConcept C111337013 @default.
- W2080446875 hasConcept C120665830 @default.
- W2080446875 hasConcept C121332964 @default.
- W2080446875 hasConcept C151730666 @default.
- W2080446875 hasConcept C171250308 @default.
- W2080446875 hasConcept C178790620 @default.
- W2080446875 hasConcept C185544564 @default.
- W2080446875 hasConcept C185592680 @default.
- W2080446875 hasConcept C19067145 @default.
- W2080446875 hasConcept C192562407 @default.
- W2080446875 hasConcept C195801359 @default.
- W2080446875 hasConcept C2780477314 @default.
- W2080446875 hasConcept C2816523 @default.
- W2080446875 hasConcept C49040817 @default.
- W2080446875 hasConcept C51141536 @default.
- W2080446875 hasConcept C520434653 @default.
- W2080446875 hasConcept C64297162 @default.
- W2080446875 hasConcept C74561354 @default.
- W2080446875 hasConcept C86803240 @default.
- W2080446875 hasConceptScore W2080446875C111337013 @default.
- W2080446875 hasConceptScore W2080446875C120665830 @default.
- W2080446875 hasConceptScore W2080446875C121332964 @default.
- W2080446875 hasConceptScore W2080446875C151730666 @default.
- W2080446875 hasConceptScore W2080446875C171250308 @default.
- W2080446875 hasConceptScore W2080446875C178790620 @default.
- W2080446875 hasConceptScore W2080446875C185544564 @default.
- W2080446875 hasConceptScore W2080446875C185592680 @default.
- W2080446875 hasConceptScore W2080446875C19067145 @default.
- W2080446875 hasConceptScore W2080446875C192562407 @default.
- W2080446875 hasConceptScore W2080446875C195801359 @default.
- W2080446875 hasConceptScore W2080446875C2780477314 @default.
- W2080446875 hasConceptScore W2080446875C2816523 @default.
- W2080446875 hasConceptScore W2080446875C49040817 @default.
- W2080446875 hasConceptScore W2080446875C51141536 @default.
- W2080446875 hasConceptScore W2080446875C520434653 @default.
- W2080446875 hasConceptScore W2080446875C64297162 @default.
- W2080446875 hasConceptScore W2080446875C74561354 @default.
- W2080446875 hasConceptScore W2080446875C86803240 @default.
- W2080446875 hasLocation W20804468751 @default.
- W2080446875 hasOpenAccess W2080446875 @default.
- W2080446875 hasPrimaryLocation W20804468751 @default.
- W2080446875 hasRelatedWork W1515040184 @default.
- W2080446875 hasRelatedWork W1966581871 @default.
- W2080446875 hasRelatedWork W1968675604 @default.
- W2080446875 hasRelatedWork W1980964407 @default.
- W2080446875 hasRelatedWork W2003108915 @default.
- W2080446875 hasRelatedWork W2132647945 @default.
- W2080446875 hasRelatedWork W2313296748 @default.
- W2080446875 hasRelatedWork W2317667535 @default.
- W2080446875 hasRelatedWork W2318078842 @default.
- W2080446875 hasRelatedWork W2322145005 @default.
- W2080446875 isParatext "false" @default.
- W2080446875 isRetracted "false" @default.
- W2080446875 magId "2080446875" @default.
- W2080446875 workType "article" @default.