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- W2080452342 abstract "Abstract This paper deals with parametric resonance of microelectromechanical (MEMS) cantilever resonators under soft damping, and soft alternating current (AC) electrostatic actuation to include fringing effect. A comparison between the Reduced Order Model (ROM) method and the Method of Multiple Scales (MMS) for both small and large amplitudes is reported. The actuation is parametric non-linear. It includes non-linear terms with periodic coefficients. The AC frequency is near resonator׳s natural frequency. The amplitude frequency response is investigated using ROM. Damping, voltage, and fringe effects on the response are also reported. It is showed that five terms ROM accurately predicts the behavior of the resonator at all amplitudes, while MMS is accurate only for small amplitudes." @default.
- W2080452342 created "2016-06-24" @default.
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- W2080452342 date "2014-11-01" @default.
- W2080452342 modified "2023-09-24" @default.
- W2080452342 title "Reduced order model of parametric resonance of electrostatically actuated MEMS cantilever resonators" @default.
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- W2080452342 doi "https://doi.org/10.1016/j.ijnonlinmec.2014.02.007" @default.
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