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- W2080476055 abstract "Sulfur-doped diamond thin films have been synthesized using CH 4 /H 2 /Ar/H 2 S gas mixture by hot filament chemicalvapor deposition (HFCVD) technique. The optical properties of the films are investigated by SEM and Raman spectra.The Gaussian line shape is used in the curve fitting for the Raman spectra. Results show that the I D /I G presents the trendof first increase and then decrease with the increase of S/C ratio, however, an upward shift of the diamond peak isobserved. This implies residual stress in the sulfur-doped diamond thin films. Moreover, optimum experimentalconditions are proposed." @default.
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- W2080476055 date "2011-06-09" @default.
- W2080476055 modified "2023-09-23" @default.
- W2080476055 title "Investigation on the optical properties of sulfur-doped diamond thin films" @default.
- W2080476055 doi "https://doi.org/10.1117/12.900241" @default.
- W2080476055 hasPublicationYear "2011" @default.
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