Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080478034> ?p ?o ?g. }
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- W2080478034 endingPage "452" @default.
- W2080478034 startingPage "447" @default.
- W2080478034 abstract "High-resolution transmission electron microscopy has been employed to study the platelet defects before annealing and the extended defects generated by annealing in the channelling-implanted silicon wafers. It has been found that there apparently appear platelet defects of quite great size and spacing at the maximum projected range of ions (R max). Additionally, the cracks induced by annealing at 550 °C are generated around R max instead of the average projected range of ions (R p) as it is in the non-channelling-implanted samples. Moreover, after annealing at 1000 °C, cracks without branches and cavities arranging in a single array, different from the forked cracks and cavities arranged in several arrays in the non-channelling-implanted samples, are observed in the channelling-implanted silicon wafers. It is suggested that those special microstructure characteristics are ascribed to the channelling effect of implanted hydrogen ions." @default.
- W2080478034 created "2016-06-24" @default.
- W2080478034 creator A5057830106 @default.
- W2080478034 creator A5086802275 @default.
- W2080478034 date "2004-07-01" @default.
- W2080478034 modified "2023-09-27" @default.
- W2080478034 title "Effect of hydrogen introduced by channelling implantation on the microstructures in silicon wafers" @default.
- W2080478034 cites W1965744356 @default.
- W2080478034 cites W1966595358 @default.
- W2080478034 cites W1973671776 @default.
- W2080478034 cites W1980186219 @default.
- W2080478034 cites W1992083355 @default.
- W2080478034 cites W2017061509 @default.
- W2080478034 cites W2019156209 @default.
- W2080478034 cites W2022601495 @default.
- W2080478034 cites W2041170535 @default.
- W2080478034 cites W2064799277 @default.
- W2080478034 cites W2141370687 @default.
- W2080478034 cites W2227997080 @default.
- W2080478034 doi "https://doi.org/10.1080/1042015042000273685" @default.
- W2080478034 hasPublicationYear "2004" @default.
- W2080478034 type Work @default.
- W2080478034 sameAs 2080478034 @default.
- W2080478034 citedByCount "0" @default.
- W2080478034 crossrefType "journal-article" @default.
- W2080478034 hasAuthorship W2080478034A5057830106 @default.
- W2080478034 hasAuthorship W2080478034A5086802275 @default.
- W2080478034 hasConcept C145148216 @default.
- W2080478034 hasConcept C146088050 @default.
- W2080478034 hasConcept C160671074 @default.
- W2080478034 hasConcept C171250308 @default.
- W2080478034 hasConcept C178790620 @default.
- W2080478034 hasConcept C185592680 @default.
- W2080478034 hasConcept C191897082 @default.
- W2080478034 hasConcept C192562407 @default.
- W2080478034 hasConcept C2777855556 @default.
- W2080478034 hasConcept C2781028716 @default.
- W2080478034 hasConcept C41823505 @default.
- W2080478034 hasConcept C512968161 @default.
- W2080478034 hasConcept C544956773 @default.
- W2080478034 hasConcept C8010536 @default.
- W2080478034 hasConcept C87976508 @default.
- W2080478034 hasConceptScore W2080478034C145148216 @default.
- W2080478034 hasConceptScore W2080478034C146088050 @default.
- W2080478034 hasConceptScore W2080478034C160671074 @default.
- W2080478034 hasConceptScore W2080478034C171250308 @default.
- W2080478034 hasConceptScore W2080478034C178790620 @default.
- W2080478034 hasConceptScore W2080478034C185592680 @default.
- W2080478034 hasConceptScore W2080478034C191897082 @default.
- W2080478034 hasConceptScore W2080478034C192562407 @default.
- W2080478034 hasConceptScore W2080478034C2777855556 @default.
- W2080478034 hasConceptScore W2080478034C2781028716 @default.
- W2080478034 hasConceptScore W2080478034C41823505 @default.
- W2080478034 hasConceptScore W2080478034C512968161 @default.
- W2080478034 hasConceptScore W2080478034C544956773 @default.
- W2080478034 hasConceptScore W2080478034C8010536 @default.
- W2080478034 hasConceptScore W2080478034C87976508 @default.
- W2080478034 hasIssue "7" @default.
- W2080478034 hasLocation W20804780341 @default.
- W2080478034 hasOpenAccess W2080478034 @default.
- W2080478034 hasPrimaryLocation W20804780341 @default.
- W2080478034 hasRelatedWork W1616992653 @default.
- W2080478034 hasRelatedWork W1976800293 @default.
- W2080478034 hasRelatedWork W2031170839 @default.
- W2080478034 hasRelatedWork W2065216462 @default.
- W2080478034 hasRelatedWork W2065258228 @default.
- W2080478034 hasRelatedWork W2065669148 @default.
- W2080478034 hasRelatedWork W2085497582 @default.
- W2080478034 hasRelatedWork W2275386326 @default.
- W2080478034 hasRelatedWork W2301811242 @default.
- W2080478034 hasRelatedWork W3101130858 @default.
- W2080478034 hasVolume "159" @default.
- W2080478034 isParatext "false" @default.
- W2080478034 isRetracted "false" @default.
- W2080478034 magId "2080478034" @default.
- W2080478034 workType "article" @default.