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- W2080491759 abstract "Abstract A method for beam particle distribution measurements of a microprobe is presented. The proposed method overcomes the disadvantages of the conventional technique of scanning the beam over a metal edge, which is limited to one dimension and possesses statistical uncertainty. The proposed method is based on scanning the beam in two dimensions over a very small aperture (pinhole) located in the image plane and measuring the beam intensity passing through the pinhole as a function of the scan position. Based on the reasonably accurate simulation of an experiment obtained with a pinhole prototype, the simulation program was employed to propose a pinhole design with a lateral resolution sufficient to resolve the particle distribution within a beam spot of 1 μm in diameter." @default.
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- W2080491759 date "1999-09-01" @default.
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- W2080491759 title "A method for microbeam spot particle distribution measurements" @default.
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- W2080491759 doi "https://doi.org/10.1016/s0168-583x(99)00339-0" @default.
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