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• W2080494847 abstract "High-density nonvolatile memory applications can benefit tremendously from three-dimensional (3D) integration wi th low power co nsumption. Among several proposals [1–4], the salicided source an d drain planar polysilicon thin-film transistor (TFT) with metal nanocrystals (NCs) and high-k gate-stack is one of the promising candidates. The self-aligned silicidation (SAS) process is often used to reduce the source, drain and gate resistances of submicron logic MOSFET [3–4]. Especially, N iSi has be en proposed as a suit able silicide for S AS process due to its low resistivity, low formation temperature, and the ext ended thermal stability range [3]. Furthermore, since Ni consumes the least amount of polysilicon to form a given thickness of silicide (NiSi), it has the advantage of utrathin polysilicon layers on insulator substrates. Metal NCs were also introduced to allow thin tunnel di electric, lower the program/erase (P/E) voltage and enhance the cycle en durance [5]. Moreover, reduced low contact resistance by Ni-based SAS process leads t o improved device characteristics and reliable process integration." @default.
• W2080494847 created "2016-06-24" @default.
• W2080494847 creator A5000294793 @default.
• W2080494847 creator A5021345838 @default.
• W2080494847 creator A5031416495 @default.
• W2080494847 creator A5038008350 @default.
• W2080494847 creator A5042016235 @default.
• W2080494847 creator A5080348888 @default.
• W2080494847 creator A5088175817 @default.
• W2080494847 date "2009-06-01" @default.
• W2080494847 modified "2023-09-26" @default.
• W2080494847 title "Ni-based self-aligned silicidation (SAS) process on source and drain for planar polysilicon TFT low-voltage flash memory cell" @default.
• W2080494847 cites W2128058741 @default.
• W2080494847 cites W2167555674 @default.
• W2080494847 doi "https://doi.org/10.1109/drc.2009.5354858" @default.
• W2080494847 hasPublicationYear "2009" @default.
• W2080494847 type Work @default.
• W2080494847 sameAs 2080494847 @default.
• W2080494847 citedByCount "1" @default.
• W2080494847 crossrefType "proceedings-article" @default.
• W2080494847 hasAuthorship W2080494847A5000294793 @default.
• W2080494847 hasAuthorship W2080494847A5021345838 @default.
• W2080494847 hasAuthorship W2080494847A5031416495 @default.
• W2080494847 hasAuthorship W2080494847A5038008350 @default.
• W2080494847 hasAuthorship W2080494847A5042016235 @default.
• W2080494847 hasAuthorship W2080494847A5080348888 @default.
• W2080494847 hasAuthorship W2080494847A5088175817 @default.
• W2080494847 hasConcept C119599485 @default.
• W2080494847 hasConcept C121684516 @default.
• W2080494847 hasConcept C127413603 @default.
• W2080494847 hasConcept C134786449 @default.
• W2080494847 hasConcept C142362112 @default.
• W2080494847 hasConcept C149635348 @default.
• W2080494847 hasConcept C153349607 @default.
• W2080494847 hasConcept C165801399 @default.
• W2080494847 hasConcept C171250308 @default.
• W2080494847 hasConcept C172385210 @default.
• W2080494847 hasConcept C173118649 @default.
• W2080494847 hasConcept C192562407 @default.
• W2080494847 hasConcept C2361726 @default.
• W2080494847 hasConcept C25356406 @default.
• W2080494847 hasConcept C2776531357 @default.
• W2080494847 hasConcept C2777526259 @default.
• W2080494847 hasConcept C2778413303 @default.
• W2080494847 hasConcept C2779227376 @default.
• W2080494847 hasConcept C2780901251 @default.
• W2080494847 hasConcept C41008148 @default.
• W2080494847 hasConcept C49040817 @default.
• W2080494847 hasConcept C53143962 @default.
• W2080494847 hasConcept C544956773 @default.
• W2080494847 hasConcept C87359718 @default.
• W2080494847 hasConceptScore W2080494847C119599485 @default.
• W2080494847 hasConceptScore W2080494847C121684516 @default.
• W2080494847 hasConceptScore W2080494847C127413603 @default.
• W2080494847 hasConceptScore W2080494847C134786449 @default.
• W2080494847 hasConceptScore W2080494847C142362112 @default.
• W2080494847 hasConceptScore W2080494847C149635348 @default.
• W2080494847 hasConceptScore W2080494847C153349607 @default.
• W2080494847 hasConceptScore W2080494847C165801399 @default.
• W2080494847 hasConceptScore W2080494847C171250308 @default.
• W2080494847 hasConceptScore W2080494847C172385210 @default.
• W2080494847 hasConceptScore W2080494847C173118649 @default.
• W2080494847 hasConceptScore W2080494847C192562407 @default.
• W2080494847 hasConceptScore W2080494847C2361726 @default.
• W2080494847 hasConceptScore W2080494847C25356406 @default.
• W2080494847 hasConceptScore W2080494847C2776531357 @default.
• W2080494847 hasConceptScore W2080494847C2777526259 @default.
• W2080494847 hasConceptScore W2080494847C2778413303 @default.
• W2080494847 hasConceptScore W2080494847C2779227376 @default.
• W2080494847 hasConceptScore W2080494847C2780901251 @default.
• W2080494847 hasConceptScore W2080494847C41008148 @default.
• W2080494847 hasConceptScore W2080494847C49040817 @default.
• W2080494847 hasConceptScore W2080494847C53143962 @default.
• W2080494847 hasConceptScore W2080494847C544956773 @default.
• W2080494847 hasConceptScore W2080494847C87359718 @default.
• W2080494847 hasLocation W20804948471 @default.
• W2080494847 hasOpenAccess W2080494847 @default.
• W2080494847 hasPrimaryLocation W20804948471 @default.
• W2080494847 hasRelatedWork W1613624030 @default.
• W2080494847 hasRelatedWork W1732907021 @default.
• W2080494847 hasRelatedWork W2047596332 @default.
• W2080494847 hasRelatedWork W2108640504 @default.
• W2080494847 hasRelatedWork W2109501742 @default.
• W2080494847 hasRelatedWork W2135443752 @default.
• W2080494847 hasRelatedWork W2137681341 @default.
• W2080494847 hasRelatedWork W2150536064 @default.
• W2080494847 hasRelatedWork W2161558805 @default.
• W2080494847 hasRelatedWork W2165638113 @default.
• W2080494847 hasRelatedWork W2167613264 @default.
• W2080494847 hasRelatedWork W2167858685 @default.
• W2080494847 hasRelatedWork W2170401555 @default.
• W2080494847 hasRelatedWork W2538188273 @default.
• W2080494847 hasRelatedWork W2548687359 @default.
• W2080494847 hasRelatedWork W2262796583 @default.
• W2080494847 hasRelatedWork W2280091983 @default.
• W2080494847 hasRelatedWork W2831283614 @default.
• W2080494847 hasRelatedWork W2840581602 @default.
• W2080494847 hasRelatedWork W2853788788 @default.
• W2080494847 isParatext "false" @default.
• W2080494847 isRetracted "false" @default.

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