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- W2080498400 abstract "In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification." @default.
- W2080498400 created "2016-06-24" @default.
- W2080498400 creator A5004786915 @default.
- W2080498400 creator A5014914208 @default.
- W2080498400 date "2006-03-01" @default.
- W2080498400 modified "2023-09-26" @default.
- W2080498400 title "Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems" @default.
- W2080498400 cites W2174603525 @default.
- W2080498400 cites W2334345834 @default.
- W2080498400 cites W3140727522 @default.
- W2080498400 doi "https://doi.org/10.4028/www.scientific.net/kem.306-308.1247" @default.
- W2080498400 hasPublicationYear "2006" @default.
- W2080498400 type Work @default.
- W2080498400 sameAs 2080498400 @default.
- W2080498400 citedByCount "0" @default.
- W2080498400 crossrefType "journal-article" @default.
- W2080498400 hasAuthorship W2080498400A5004786915 @default.
- W2080498400 hasAuthorship W2080498400A5014914208 @default.
- W2080498400 hasConcept C111919701 @default.
- W2080498400 hasConcept C127413603 @default.
- W2080498400 hasConcept C134306372 @default.
- W2080498400 hasConcept C135628077 @default.
- W2080498400 hasConcept C136525101 @default.
- W2080498400 hasConcept C142724271 @default.
- W2080498400 hasConcept C155840801 @default.
- W2080498400 hasConcept C192562407 @default.
- W2080498400 hasConcept C204787440 @default.
- W2080498400 hasConcept C33923547 @default.
- W2080498400 hasConcept C37977207 @default.
- W2080498400 hasConcept C41008148 @default.
- W2080498400 hasConcept C49040817 @default.
- W2080498400 hasConcept C55884918 @default.
- W2080498400 hasConcept C66938386 @default.
- W2080498400 hasConcept C70615421 @default.
- W2080498400 hasConcept C71924100 @default.
- W2080498400 hasConcept C73000952 @default.
- W2080498400 hasConcept C78519656 @default.
- W2080498400 hasConcept C93779851 @default.
- W2080498400 hasConcept C97937538 @default.
- W2080498400 hasConcept C98045186 @default.
- W2080498400 hasConceptScore W2080498400C111919701 @default.
- W2080498400 hasConceptScore W2080498400C127413603 @default.
- W2080498400 hasConceptScore W2080498400C134306372 @default.
- W2080498400 hasConceptScore W2080498400C135628077 @default.
- W2080498400 hasConceptScore W2080498400C136525101 @default.
- W2080498400 hasConceptScore W2080498400C142724271 @default.
- W2080498400 hasConceptScore W2080498400C155840801 @default.
- W2080498400 hasConceptScore W2080498400C192562407 @default.
- W2080498400 hasConceptScore W2080498400C204787440 @default.
- W2080498400 hasConceptScore W2080498400C33923547 @default.
- W2080498400 hasConceptScore W2080498400C37977207 @default.
- W2080498400 hasConceptScore W2080498400C41008148 @default.
- W2080498400 hasConceptScore W2080498400C49040817 @default.
- W2080498400 hasConceptScore W2080498400C55884918 @default.
- W2080498400 hasConceptScore W2080498400C66938386 @default.
- W2080498400 hasConceptScore W2080498400C70615421 @default.
- W2080498400 hasConceptScore W2080498400C71924100 @default.
- W2080498400 hasConceptScore W2080498400C73000952 @default.
- W2080498400 hasConceptScore W2080498400C78519656 @default.
- W2080498400 hasConceptScore W2080498400C93779851 @default.
- W2080498400 hasConceptScore W2080498400C97937538 @default.
- W2080498400 hasConceptScore W2080498400C98045186 @default.
- W2080498400 hasLocation W20804984001 @default.
- W2080498400 hasOpenAccess W2080498400 @default.
- W2080498400 hasPrimaryLocation W20804984001 @default.
- W2080498400 hasRelatedWork W1953927448 @default.
- W2080498400 hasRelatedWork W1966427537 @default.
- W2080498400 hasRelatedWork W1984240246 @default.
- W2080498400 hasRelatedWork W2018422855 @default.
- W2080498400 hasRelatedWork W2077579472 @default.
- W2080498400 hasRelatedWork W2137966270 @default.
- W2080498400 hasRelatedWork W2584611831 @default.
- W2080498400 hasRelatedWork W2624280759 @default.
- W2080498400 hasRelatedWork W2700598790 @default.
- W2080498400 hasRelatedWork W3199420780 @default.
- W2080498400 isParatext "false" @default.
- W2080498400 isRetracted "false" @default.
- W2080498400 magId "2080498400" @default.
- W2080498400 workType "article" @default.