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- W2080567046 abstract "A maskless process has been realized by combining reactive ion beam etching (RIBE) with focused ion beam (FIB) technology. Si patterns of 0.3 µm with no undercutting can be obtained using RIBE with electron cyclotron resonance (ECR) plasma. A Ga compound is formed as an in situ etching mask." @default.
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- W2080567046 date "1989-09-01" @default.
- W2080567046 modified "2023-10-14" @default.
- W2080567046 title "Reactive Ion Beam Etching Using a Selective Gallium Doping Method" @default.
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