Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080572444> ?p ?o ?g. }
- W2080572444 endingPage "156" @default.
- W2080572444 startingPage "149" @default.
- W2080572444 abstract "The influence of furnace and rapid thermal annealing (RTA) on X-ray-amorphous, chemically vapor deposited (CVD) W-Si-N barrier layers on SiO2/Si structures have been investigated. Enhanced amount of nitrogen loss from the barrier films with increased annealing temperatures has been observed. Spectral emissometry has been employed as a novel tool to study the changes in the optical properties of the W-Si-N films in the infrared region. Annealing the structures at 800°C has resulted in a significant increase in surface reflectance along with a decrease in transmittance, while that at 450°C has resulted in a relatively small decrease in both reflectance and transmittance. All of the annealing conditions have led to reduced film resistivity. It is postulated that nitrogen occupies two different interstitial sites in the micro/nanocrystallites of as-deposited W-Si-N structure and leaves these sites upon annealing at high temperatures. Majority of the N atoms or molecules in the annealed W-Si-N films are assigned to the grain boundaries." @default.
- W2080572444 created "2016-06-24" @default.
- W2080572444 creator A5018662253 @default.
- W2080572444 creator A5020104315 @default.
- W2080572444 creator A5020519660 @default.
- W2080572444 creator A5043579926 @default.
- W2080572444 creator A5049047525 @default.
- W2080572444 creator A5057338799 @default.
- W2080572444 creator A5060661147 @default.
- W2080572444 creator A5064395043 @default.
- W2080572444 creator A5074182025 @default.
- W2080572444 date "1999-09-01" @default.
- W2080572444 modified "2023-09-26" @default.
- W2080572444 title "Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials" @default.
- W2080572444 cites W1970284978 @default.
- W2080572444 cites W1975868821 @default.
- W2080572444 cites W1988359053 @default.
- W2080572444 cites W1989554660 @default.
- W2080572444 cites W1994489293 @default.
- W2080572444 cites W1999376374 @default.
- W2080572444 cites W2000394550 @default.
- W2080572444 cites W2001555724 @default.
- W2080572444 cites W2003800854 @default.
- W2080572444 cites W2007551590 @default.
- W2080572444 cites W2015834396 @default.
- W2080572444 cites W2022583654 @default.
- W2080572444 cites W2022840622 @default.
- W2080572444 cites W2028904648 @default.
- W2080572444 cites W2030472858 @default.
- W2080572444 cites W2035376285 @default.
- W2080572444 cites W2041139139 @default.
- W2080572444 cites W2047767157 @default.
- W2080572444 cites W2048740550 @default.
- W2080572444 cites W2050040838 @default.
- W2080572444 cites W2050468714 @default.
- W2080572444 cites W2054451440 @default.
- W2080572444 cites W2063947867 @default.
- W2080572444 cites W2069256581 @default.
- W2080572444 cites W2077461818 @default.
- W2080572444 cites W2081033007 @default.
- W2080572444 cites W2086346691 @default.
- W2080572444 cites W2090284212 @default.
- W2080572444 cites W2130060715 @default.
- W2080572444 cites W2131986834 @default.
- W2080572444 cites W2147584468 @default.
- W2080572444 cites W2153861370 @default.
- W2080572444 cites W2165141735 @default.
- W2080572444 cites W2172232804 @default.
- W2080572444 cites W2274917804 @default.
- W2080572444 doi "https://doi.org/10.1016/s0040-6090(99)00424-1" @default.
- W2080572444 hasPublicationYear "1999" @default.
- W2080572444 type Work @default.
- W2080572444 sameAs 2080572444 @default.
- W2080572444 citedByCount "15" @default.
- W2080572444 countsByYear W20805724442013 @default.
- W2080572444 countsByYear W20805724442016 @default.
- W2080572444 countsByYear W20805724442017 @default.
- W2080572444 countsByYear W20805724442020 @default.
- W2080572444 crossrefType "journal-article" @default.
- W2080572444 hasAuthorship W2080572444A5018662253 @default.
- W2080572444 hasAuthorship W2080572444A5020104315 @default.
- W2080572444 hasAuthorship W2080572444A5020519660 @default.
- W2080572444 hasAuthorship W2080572444A5043579926 @default.
- W2080572444 hasAuthorship W2080572444A5049047525 @default.
- W2080572444 hasAuthorship W2080572444A5057338799 @default.
- W2080572444 hasAuthorship W2080572444A5060661147 @default.
- W2080572444 hasAuthorship W2080572444A5064395043 @default.
- W2080572444 hasAuthorship W2080572444A5074182025 @default.
- W2080572444 hasConcept C113196181 @default.
- W2080572444 hasConcept C119599485 @default.
- W2080572444 hasConcept C127413603 @default.
- W2080572444 hasConcept C150493377 @default.
- W2080572444 hasConcept C159985019 @default.
- W2080572444 hasConcept C178790620 @default.
- W2080572444 hasConcept C185592680 @default.
- W2080572444 hasConcept C192562407 @default.
- W2080572444 hasConcept C2777855556 @default.
- W2080572444 hasConcept C2779227376 @default.
- W2080572444 hasConcept C2779833192 @default.
- W2080572444 hasConcept C43617362 @default.
- W2080572444 hasConcept C49040817 @default.
- W2080572444 hasConcept C537208039 @default.
- W2080572444 hasConcept C56052488 @default.
- W2080572444 hasConcept C69990965 @default.
- W2080572444 hasConcept C8010536 @default.
- W2080572444 hasConceptScore W2080572444C113196181 @default.
- W2080572444 hasConceptScore W2080572444C119599485 @default.
- W2080572444 hasConceptScore W2080572444C127413603 @default.
- W2080572444 hasConceptScore W2080572444C150493377 @default.
- W2080572444 hasConceptScore W2080572444C159985019 @default.
- W2080572444 hasConceptScore W2080572444C178790620 @default.
- W2080572444 hasConceptScore W2080572444C185592680 @default.
- W2080572444 hasConceptScore W2080572444C192562407 @default.
- W2080572444 hasConceptScore W2080572444C2777855556 @default.
- W2080572444 hasConceptScore W2080572444C2779227376 @default.
- W2080572444 hasConceptScore W2080572444C2779833192 @default.
- W2080572444 hasConceptScore W2080572444C43617362 @default.
- W2080572444 hasConceptScore W2080572444C49040817 @default.