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• W2080593753 endingPage "353" @default.
• W2080593753 startingPage "347" @default.
• W2080593753 abstract "The evolution of the intrinsic stress with the annealing temperature in silicon oxide layers thermally grown and deposited by the low-pressure chemical vapour method has been analysed by the reflection-absorption Fourier transform infrared (FT-IR) technique. The results show that the annealing process in the low-pressure chemical vapour deposition (LPCVD) silicon oxide produces a high compressive stress in the wafer plane, due to a decrease of density in the layer. Moreover, for overlying structures used in micromechanics, such as polycrystalline silicon-silicon oxide, we.have pointed out the existence of induced stress between the layers. The stress evolution in the silicon oxide layers has been compared with the results obtained using warpage and X-ray diffraction measurements." @default.
• W2080593753 created "2016-06-24" @default.
• W2080593753 creator A5009042577 @default.
• W2080593753 creator A5021608362 @default.
• W2080593753 creator A5062496093 @default.
• W2080593753 creator A5063174358 @default.
• W2080593753 creator A5063351329 @default.
• W2080593753 creator A5091307484 @default.
• W2080593753 date "1992-04-01" @default.
• W2080593753 modified "2023-10-01" @default.
• W2080593753 title "Analysis by FT-IR spectroscopy of SiO2-polycrystalline structures used in micromechanics: Stress measurements" @default.
• W2080593753 cites W1970486602 @default.
• W2080593753 cites W1987230636 @default.
• W2080593753 cites W1988698109 @default.
• W2080593753 cites W2012401224 @default.
• W2080593753 cites W2013053623 @default.
• W2080593753 cites W2024518381 @default.
• W2080593753 cites W2029672137 @default.
• W2080593753 cites W2048572166 @default.
• W2080593753 cites W2083605100 @default.
• W2080593753 cites W2089531636 @default.
• W2080593753 cites W2112514347 @default.
• W2080593753 cites W2121715063 @default.
• W2080593753 cites W2156639697 @default.
• W2080593753 cites W2335229263 @default.
• W2080593753 doi "https://doi.org/10.1016/0924-4247(92)80010-z" @default.
• W2080593753 hasPublicationYear "1992" @default.
• W2080593753 type Work @default.
• W2080593753 sameAs 2080593753 @default.
• W2080593753 citedByCount "8" @default.
• W2080593753 countsByYear W20805937532019 @default.
• W2080593753 countsByYear W20805937532020 @default.
• W2080593753 countsByYear W20805937532021 @default.
• W2080593753 countsByYear W20805937532022 @default.
• W2080593753 crossrefType "journal-article" @default.
• W2080593753 hasAuthorship W2080593753A5009042577 @default.
• W2080593753 hasAuthorship W2080593753A5021608362 @default.
• W2080593753 hasAuthorship W2080593753A5062496093 @default.
• W2080593753 hasAuthorship W2080593753A5063174358 @default.
• W2080593753 hasAuthorship W2080593753A5063351329 @default.
• W2080593753 hasAuthorship W2080593753A5091307484 @default.
• W2080593753 hasConcept C104779481 @default.
• W2080593753 hasConcept C113196181 @default.
• W2080593753 hasConcept C120665830 @default.
• W2080593753 hasConcept C121332964 @default.
• W2080593753 hasConcept C138885662 @default.
• W2080593753 hasConcept C153642686 @default.
• W2080593753 hasConcept C159985019 @default.
• W2080593753 hasConcept C160671074 @default.
• W2080593753 hasConcept C160892712 @default.
• W2080593753 hasConcept C178790620 @default.
• W2080593753 hasConcept C185592680 @default.
• W2080593753 hasConcept C191897082 @default.
• W2080593753 hasConcept C192562407 @default.
• W2080593753 hasConcept C21036866 @default.
• W2080593753 hasConcept C2777431650 @default.
• W2080593753 hasConcept C2777855556 @default.
• W2080593753 hasConcept C2779105228 @default.
• W2080593753 hasConcept C2779227376 @default.
• W2080593753 hasConcept C2779851234 @default.
• W2080593753 hasConcept C2780565262 @default.
• W2080593753 hasConcept C37167619 @default.
• W2080593753 hasConcept C41895202 @default.
• W2080593753 hasConcept C43617362 @default.
• W2080593753 hasConcept C49040817 @default.
• W2080593753 hasConcept C544956773 @default.
• W2080593753 hasConcept C57410435 @default.
• W2080593753 hasConcept C87359718 @default.
• W2080593753 hasConceptScore W2080593753C104779481 @default.
• W2080593753 hasConceptScore W2080593753C113196181 @default.
• W2080593753 hasConceptScore W2080593753C120665830 @default.
• W2080593753 hasConceptScore W2080593753C121332964 @default.
• W2080593753 hasConceptScore W2080593753C138885662 @default.
• W2080593753 hasConceptScore W2080593753C153642686 @default.
• W2080593753 hasConceptScore W2080593753C159985019 @default.
• W2080593753 hasConceptScore W2080593753C160671074 @default.
• W2080593753 hasConceptScore W2080593753C160892712 @default.
• W2080593753 hasConceptScore W2080593753C178790620 @default.
• W2080593753 hasConceptScore W2080593753C185592680 @default.
• W2080593753 hasConceptScore W2080593753C191897082 @default.
• W2080593753 hasConceptScore W2080593753C192562407 @default.
• W2080593753 hasConceptScore W2080593753C21036866 @default.
• W2080593753 hasConceptScore W2080593753C2777431650 @default.
• W2080593753 hasConceptScore W2080593753C2777855556 @default.
• W2080593753 hasConceptScore W2080593753C2779105228 @default.
• W2080593753 hasConceptScore W2080593753C2779227376 @default.
• W2080593753 hasConceptScore W2080593753C2779851234 @default.
• W2080593753 hasConceptScore W2080593753C2780565262 @default.
• W2080593753 hasConceptScore W2080593753C37167619 @default.
• W2080593753 hasConceptScore W2080593753C41895202 @default.
• W2080593753 hasConceptScore W2080593753C43617362 @default.
• W2080593753 hasConceptScore W2080593753C49040817 @default.
• W2080593753 hasConceptScore W2080593753C544956773 @default.
• W2080593753 hasConceptScore W2080593753C57410435 @default.
• W2080593753 hasConceptScore W2080593753C87359718 @default.
• W2080593753 hasIssue "1-3" @default.
• W2080593753 hasLocation W20805937531 @default.
• W2080593753 hasOpenAccess W2080593753 @default.

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