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- W2080595911 abstract "Abstract An evaluation is made of known attempts at the realization of a dry lithography process. Their shortcomings and the causes of failure of all-dry lithography processes are pointed out. The results of an investigation of an all-dry lithography process based on octavinylsilsesquioxane are given. The availability, the simplicity and the agreement of this process with standard technologies are shown." @default.
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- W2080595911 date "1983-03-01" @default.
- W2080595911 modified "2023-09-27" @default.
- W2080595911 title "All-dry vacuum submicron lithography" @default.
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- W2080595911 doi "https://doi.org/10.1016/0040-6090(83)90103-7" @default.
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