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- W2080604349 abstract "In this paper, we present studies of plasma-enhanced chemical vapor deposited silicon nitride in which photoluminescence imaging was used to characterize our deposition process. A showcase of different processing issues such as equipment design, processing conditions, and manual handling is presented. We also demonstrate how photoluminescence imaging can be particularly useful for process monitoring, diagnoses, and development. An increase in implied V <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>oc</sub> of up to 25 mV was achieved through the use of PL imaging as a diagnostic tool" @default.
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- W2080604349 date "2006-01-01" @default.
- W2080604349 modified "2023-09-27" @default.
- W2080604349 title "Characterization of PECVD Silicon Nitride Passivation with Photoluminescence Imaging" @default.
- W2080604349 cites W1976344960 @default.
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- W2080604349 doi "https://doi.org/10.1109/wcpec.2006.279687" @default.
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