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- W2080608957 abstract "In this work, the formation of micro-and nanoscale periodic structures on the surface of system SiO<sub>2</sub>/Si by nanosecond laser pulses has been investigated. Under irradiation of experimental samples with ultraviolet ArF laser pulse (193 nm) were obtained periodic wave-like structures on the surface. The dependence of the surface topology of system SiO<sub>2</sub>/Si on the energy density of the laser pulse and the number of pulses has been studied." @default.
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- W2080608957 date "2013-11-28" @default.
- W2080608957 modified "2023-10-16" @default.
- W2080608957 title "Nanostructured system SiO2/Si by ArF excimer laser irradiation" @default.
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- W2080608957 doi "https://doi.org/10.1117/12.2053278" @default.
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