Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080653666> ?p ?o ?g. }
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- W2080653666 endingPage "L802" @default.
- W2080653666 startingPage "L802" @default.
- W2080653666 abstract "An electron-cyclotron resonance (ECR) plasma source which generates a long and narrow plasma 500 mm in length has been developed. The plasma is generated by a 2.45 GHz traveling microwave which is supplied through a slot antenna prepared in the waveguide in a magnetic field generated by permanent magnets. Diamond-like carbon (DLC) films were deposited in a wide zone 340 mm in width. The variation of film thickness was less than 10%. The resistivity of the DLC film was ∼9.62×10 11 Ω·cm and permittivity, 3.63. The prepared Al/DLC/Si metal/insulator/semiconductor (MIS) diode revealed fairly good field effect in its capacitance-voltage curve." @default.
- W2080653666 created "2016-06-24" @default.
- W2080653666 creator A5005424168 @default.
- W2080653666 creator A5022289596 @default.
- W2080653666 creator A5032492611 @default.
- W2080653666 creator A5035747482 @default.
- W2080653666 creator A5041490220 @default.
- W2080653666 creator A5060493253 @default.
- W2080653666 date "1993-06-01" @default.
- W2080653666 modified "2023-09-23" @default.
- W2080653666 title "Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave" @default.
- W2080653666 cites W1981974804 @default.
- W2080653666 cites W2046800440 @default.
- W2080653666 doi "https://doi.org/10.1143/jjap.32.l802" @default.
- W2080653666 hasPublicationYear "1993" @default.
- W2080653666 type Work @default.
- W2080653666 sameAs 2080653666 @default.
- W2080653666 citedByCount "4" @default.
- W2080653666 crossrefType "journal-article" @default.
- W2080653666 hasAuthorship W2080653666A5005424168 @default.
- W2080653666 hasAuthorship W2080653666A5022289596 @default.
- W2080653666 hasAuthorship W2080653666A5032492611 @default.
- W2080653666 hasAuthorship W2080653666A5035747482 @default.
- W2080653666 hasAuthorship W2080653666A5041490220 @default.
- W2080653666 hasAuthorship W2080653666A5060493253 @default.
- W2080653666 hasConcept C113196181 @default.
- W2080653666 hasConcept C121332964 @default.
- W2080653666 hasConcept C123380192 @default.
- W2080653666 hasConcept C132427895 @default.
- W2080653666 hasConcept C159985019 @default.
- W2080653666 hasConcept C171250308 @default.
- W2080653666 hasConcept C175361016 @default.
- W2080653666 hasConcept C185592680 @default.
- W2080653666 hasConcept C188224857 @default.
- W2080653666 hasConcept C19067145 @default.
- W2080653666 hasConcept C192562407 @default.
- W2080653666 hasConcept C2776921476 @default.
- W2080653666 hasConcept C39527238 @default.
- W2080653666 hasConcept C43617362 @default.
- W2080653666 hasConcept C44838205 @default.
- W2080653666 hasConcept C49040817 @default.
- W2080653666 hasConcept C62520636 @default.
- W2080653666 hasConcept C75937256 @default.
- W2080653666 hasConcept C78434282 @default.
- W2080653666 hasConcept C82706917 @default.
- W2080653666 hasConceptScore W2080653666C113196181 @default.
- W2080653666 hasConceptScore W2080653666C121332964 @default.
- W2080653666 hasConceptScore W2080653666C123380192 @default.
- W2080653666 hasConceptScore W2080653666C132427895 @default.
- W2080653666 hasConceptScore W2080653666C159985019 @default.
- W2080653666 hasConceptScore W2080653666C171250308 @default.
- W2080653666 hasConceptScore W2080653666C175361016 @default.
- W2080653666 hasConceptScore W2080653666C185592680 @default.
- W2080653666 hasConceptScore W2080653666C188224857 @default.
- W2080653666 hasConceptScore W2080653666C19067145 @default.
- W2080653666 hasConceptScore W2080653666C192562407 @default.
- W2080653666 hasConceptScore W2080653666C2776921476 @default.
- W2080653666 hasConceptScore W2080653666C39527238 @default.
- W2080653666 hasConceptScore W2080653666C43617362 @default.
- W2080653666 hasConceptScore W2080653666C44838205 @default.
- W2080653666 hasConceptScore W2080653666C49040817 @default.
- W2080653666 hasConceptScore W2080653666C62520636 @default.
- W2080653666 hasConceptScore W2080653666C75937256 @default.
- W2080653666 hasConceptScore W2080653666C78434282 @default.
- W2080653666 hasConceptScore W2080653666C82706917 @default.
- W2080653666 hasIssue "6A" @default.
- W2080653666 hasLocation W20806536661 @default.
- W2080653666 hasOpenAccess W2080653666 @default.
- W2080653666 hasPrimaryLocation W20806536661 @default.
- W2080653666 hasRelatedWork W1892289783 @default.
- W2080653666 hasRelatedWork W1971235368 @default.
- W2080653666 hasRelatedWork W1987064739 @default.
- W2080653666 hasRelatedWork W2005159424 @default.
- W2080653666 hasRelatedWork W2073122461 @default.
- W2080653666 hasRelatedWork W2080653666 @default.
- W2080653666 hasRelatedWork W2091765834 @default.
- W2080653666 hasRelatedWork W2181860531 @default.
- W2080653666 hasRelatedWork W2387395194 @default.
- W2080653666 hasRelatedWork W2670893 @default.
- W2080653666 hasVolume "32" @default.
- W2080653666 isParatext "false" @default.
- W2080653666 isRetracted "false" @default.
- W2080653666 magId "2080653666" @default.
- W2080653666 workType "article" @default.