FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2080711999> ?p ?o ?g. }

• W2080711999 abstract "The authors investigated the formation of nanometer-scale pore (nanopore) arrays by chemical vapor deposition (CVD) of heteroepitaxial SiC films on Si(100) membranes prepared by anisotropic etching of silicon on insulator substrates from the back-side surfaces. SiC heteroepitaxial films with thicknesses of ∼10 nm were grown by pulse jet CVD of CH3SiH3 gas. During the SiC growth, inverted pyramidal pits with {111} facets grew into the Si membranes due to the surface diffusion of Si atoms outward from the bulk Si. Nanopores were formed at the tips of the inverted pyramidal pits. The pore sizes were found to be dependent on the existence of the buried oxide layers under the Si membranes. It is suggested that maintaining the {111} facets during the SiC growth on the Si membrane is essential for smaller size (∼nm) pore formation." @default.
• W2080711999 created "2016-06-24" @default.
• W2080711999 creator A5016974770 @default.
• W2080711999 creator A5024166390 @default.
• W2080711999 creator A5032396607 @default.
• W2080711999 creator A5039276245 @default.
• W2080711999 creator A5053786684 @default.
• W2080711999 creator A5081006876 @default.
• W2080711999 date "2011-10-07" @default.
• W2080711999 modified "2023-09-27" @default.
• W2080711999 title "Semiconductor nanopores formed by chemical vapor deposition of heteroepitaxial SiC films on SOI(100) substrates" @default.
• W2080711999 cites W1492856992 @default.
• W2080711999 cites W1969025862 @default.
• W2080711999 cites W1984181350 @default.
• W2080711999 cites W1985601232 @default.
• W2080711999 cites W1991674727 @default.
• W2080711999 cites W2001520983 @default.
• W2080711999 cites W2005353978 @default.
• W2080711999 cites W2008924171 @default.
• W2080711999 cites W2016659220 @default.
• W2080711999 cites W2027009369 @default.
• W2080711999 cites W2030471593 @default.
• W2080711999 cites W2036105970 @default.
• W2080711999 cites W2037257326 @default.
• W2080711999 cites W2040102473 @default.
• W2080711999 cites W2043416319 @default.
• W2080711999 cites W2059114053 @default.
• W2080711999 cites W2065516174 @default.
• W2080711999 cites W2082816250 @default.
• W2080711999 cites W2083344162 @default.
• W2080711999 cites W2083782746 @default.
• W2080711999 cites W2092346700 @default.
• W2080711999 cites W2095898308 @default.
• W2080711999 cites W2118579429 @default.
• W2080711999 cites W2119387709 @default.
• W2080711999 cites W2125021618 @default.
• W2080711999 cites W2127407003 @default.
• W2080711999 cites W2129979528 @default.
• W2080711999 cites W2134158954 @default.
• W2080711999 doi "https://doi.org/10.1116/1.3646471" @default.
• W2080711999 hasPublicationYear "2011" @default.
• W2080711999 type Work @default.
• W2080711999 sameAs 2080711999 @default.
• W2080711999 citedByCount "7" @default.
• W2080711999 countsByYear W20807119992013 @default.
• W2080711999 countsByYear W20807119992015 @default.
• W2080711999 countsByYear W20807119992016 @default.
• W2080711999 countsByYear W20807119992019 @default.
• W2080711999 countsByYear W20807119992023 @default.
• W2080711999 crossrefType "journal-article" @default.
• W2080711999 hasAuthorship W2080711999A5016974770 @default.
• W2080711999 hasAuthorship W2080711999A5024166390 @default.
• W2080711999 hasAuthorship W2080711999A5032396607 @default.
• W2080711999 hasAuthorship W2080711999A5039276245 @default.
• W2080711999 hasAuthorship W2080711999A5053786684 @default.
• W2080711999 hasAuthorship W2080711999A5081006876 @default.
• W2080711999 hasBestOaLocation W20807119992 @default.
• W2080711999 hasConcept C100460472 @default.
• W2080711999 hasConcept C108225325 @default.
• W2080711999 hasConcept C110738630 @default.
• W2080711999 hasConcept C127413603 @default.
• W2080711999 hasConcept C141795571 @default.
• W2080711999 hasConcept C159985019 @default.
• W2080711999 hasConcept C171250308 @default.
• W2080711999 hasConcept C185592680 @default.
• W2080711999 hasConcept C192562407 @default.
• W2080711999 hasConcept C2779227376 @default.
• W2080711999 hasConcept C33220542 @default.
• W2080711999 hasConcept C41625074 @default.
• W2080711999 hasConcept C42360764 @default.
• W2080711999 hasConcept C49040817 @default.
• W2080711999 hasConcept C53143962 @default.
• W2080711999 hasConcept C544956773 @default.
• W2080711999 hasConcept C55493867 @default.
• W2080711999 hasConcept C57410435 @default.
• W2080711999 hasConcept C77066764 @default.
• W2080711999 hasConceptScore W2080711999C100460472 @default.
• W2080711999 hasConceptScore W2080711999C108225325 @default.
• W2080711999 hasConceptScore W2080711999C110738630 @default.
• W2080711999 hasConceptScore W2080711999C127413603 @default.
• W2080711999 hasConceptScore W2080711999C141795571 @default.
• W2080711999 hasConceptScore W2080711999C159985019 @default.
• W2080711999 hasConceptScore W2080711999C171250308 @default.
• W2080711999 hasConceptScore W2080711999C185592680 @default.
• W2080711999 hasConceptScore W2080711999C192562407 @default.
• W2080711999 hasConceptScore W2080711999C2779227376 @default.
• W2080711999 hasConceptScore W2080711999C33220542 @default.
• W2080711999 hasConceptScore W2080711999C41625074 @default.
• W2080711999 hasConceptScore W2080711999C42360764 @default.
• W2080711999 hasConceptScore W2080711999C49040817 @default.
• W2080711999 hasConceptScore W2080711999C53143962 @default.
• W2080711999 hasConceptScore W2080711999C544956773 @default.
• W2080711999 hasConceptScore W2080711999C55493867 @default.
• W2080711999 hasConceptScore W2080711999C57410435 @default.
• W2080711999 hasConceptScore W2080711999C77066764 @default.
• W2080711999 hasIssue "6" @default.
• W2080711999 hasLocation W20807119991 @default.
• W2080711999 hasLocation W20807119992 @default.
• W2080711999 hasOpenAccess W2080711999 @default.
• W2080711999 hasPrimaryLocation W20807119991 @default.

• next