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- W2080753606 abstract "The oxygen sensitive field effect structure Si/LaF3/metal was realized. To find correlations to sensor response time and to improve sensor characteristics the composition of the LaF3 surface was changed in a defined manner by means of a pretreatment and a variation of the preparation parameters of the LaF3 layer. It could be shown by means of XPS measurements that there is a correlation between the surface concentration of different oxygen species in LaF3 and the response kinetics of the sensor structure. To get information concerning the influence of the catalytic metal the preparation parameters of the platinum layer were varied and new gate materials as for instance gold and iridium were used. A model is given to explain these results." @default.
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- W2080753606 date "1993-10-01" @default.
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- W2080753606 title "Influence of the LaF3/metal interface on the properties of a low temperature oxygen sensor" @default.
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- W2080753606 doi "https://doi.org/10.1016/0925-4005(93)85190-l" @default.
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